Features of mechanical scanning probe lithography on graphene oxide and As(Ge)Se chalcogenide resist
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| Date: | 2018 |
|---|---|
| Main Authors: | P. M. Lytvyn, S. V. Malyuta, I. Z. Indutnyi, A. A. Efremov, O. V. Slobodyan, V. I. Minko, A. N. Nazarov, O. V. Borysov, I. V. Prokopenko |
| Format: | Article |
| Language: | English |
| Published: |
2018
|
| Series: | Semiconductor Physics, Quantum Electronics and Optoelectronics |
| Online Access: | http://jnas.nbuv.gov.ua/article/UJRN-0000899772 |
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| Journal Title: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
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