Surface roughness of optoelectronic components in mechanical polishing
Saved in:
| Date: | 2018 |
|---|---|
| Main Author: | |
| Format: | Article |
| Language: | English |
| Published: |
2018
|
| Series: | Superhard Materials |
| Online Access: | http://jnas.nbuv.gov.ua/article/UJRN-0000940147 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| Journal Title: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
Institution
Library portal of National Academy of Sciences of Ukraine | LibNAS| _version_ | 1859508052619689984 |
|---|---|
| author | Ju. D. Filatov |
| author_facet | Ju. D. Filatov |
| author_sort | Ju. D. Filatov |
| collection | Open-Science |
| first_indexed | 2025-07-17T15:41:30Z |
| format | Article |
| id | open-sciencenbuvgovua-29696 |
| institution | Library portal of National Academy of Sciences of Ukraine | LibNAS |
| language | English |
| last_indexed | 2025-07-17T15:41:30Z |
| publishDate | 2018 |
| record_format | dspace |
| series | Superhard Materials |
| spelling | open-sciencenbuvgovua-296962024-02-27T21:56:51Z Surface roughness of optoelectronic components in mechanical polishing Ju. D. Filatov 0203-3119 2018 en Superhard Materials http://jnas.nbuv.gov.ua/article/UJRN-0000940147 Article |
| spellingShingle | Superhard Materials Ju. D. Filatov Surface roughness of optoelectronic components in mechanical polishing |
| title | Surface roughness of optoelectronic components in mechanical polishing |
| title_full | Surface roughness of optoelectronic components in mechanical polishing |
| title_fullStr | Surface roughness of optoelectronic components in mechanical polishing |
| title_full_unstemmed | Surface roughness of optoelectronic components in mechanical polishing |
| title_short | Surface roughness of optoelectronic components in mechanical polishing |
| title_sort | surface roughness of optoelectronic components in mechanical polishing |
| url | http://jnas.nbuv.gov.ua/article/UJRN-0000940147 |
| work_keys_str_mv | AT judfilatov surfaceroughnessofoptoelectroniccomponentsinmechanicalpolishing |