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Surface roughness of optoelectronic components in mechanical polishing
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| Format: | Article |
| Language: | English |
| Published: |
2018
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| Series: | Superhard Materials |
| Online Access: | http://jnas.nbuv.gov.ua/article/UJRN-0000940147 |
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open-sciencenbuvgovua-296962024-02-27T21:56:51Z Surface roughness of optoelectronic components in mechanical polishing Ju. D. Filatov 0203-3119 2018 en Superhard Materials http://jnas.nbuv.gov.ua/article/UJRN-0000940147 Article |
| institution |
Library portal of National Academy of Sciences of Ukraine | LibNAS |
| collection |
Open-Science |
| language |
English |
| series |
Superhard Materials |
| spellingShingle |
Superhard Materials Ju. D. Filatov Surface roughness of optoelectronic components in mechanical polishing |
| format |
Article |
| author |
Ju. D. Filatov |
| author_facet |
Ju. D. Filatov |
| author_sort |
Ju. D. Filatov |
| title |
Surface roughness of optoelectronic components in mechanical polishing |
| title_short |
Surface roughness of optoelectronic components in mechanical polishing |
| title_full |
Surface roughness of optoelectronic components in mechanical polishing |
| title_fullStr |
Surface roughness of optoelectronic components in mechanical polishing |
| title_full_unstemmed |
Surface roughness of optoelectronic components in mechanical polishing |
| title_sort |
surface roughness of optoelectronic components in mechanical polishing |
| publishDate |
2018 |
| url |
http://jnas.nbuv.gov.ua/article/UJRN-0000940147 |
| work_keys_str_mv |
AT judfilatov surfaceroughnessofoptoelectroniccomponentsinmechanicalpolishing |
| first_indexed |
2024-03-30T08:27:40Z |
| last_indexed |
2024-03-30T08:27:40Z |
| _version_ |
1796880369173135360 |