Interaction between debris particles and polishing powder wear particles in polishing optoelectronic components

Збережено в:
Бібліографічні деталі
Дата:2018
Автор: Ju. D. Filatov
Формат: Стаття
Мова:Англійська
Опубліковано: 2018
Назва видання:Superhard Materials
Онлайн доступ:http://jnas.nbuv.gov.ua/article/UJRN-0000940299
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Назва журналу:Library portal of National Academy of Sciences of Ukraine | LibNAS

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Library portal of National Academy of Sciences of Ukraine | LibNAS
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spelling open-sciencenbuvgovua-297532024-02-27T21:57:16Z Interaction between debris particles and polishing powder wear particles in polishing optoelectronic components Ju. D. Filatov 0203-3119 2018 en Superhard Materials http://jnas.nbuv.gov.ua/article/UJRN-0000940299 Article
spellingShingle Superhard Materials
Ju. D. Filatov
Interaction between debris particles and polishing powder wear particles in polishing optoelectronic components
title Interaction between debris particles and polishing powder wear particles in polishing optoelectronic components
title_full Interaction between debris particles and polishing powder wear particles in polishing optoelectronic components
title_fullStr Interaction between debris particles and polishing powder wear particles in polishing optoelectronic components
title_full_unstemmed Interaction between debris particles and polishing powder wear particles in polishing optoelectronic components
title_short Interaction between debris particles and polishing powder wear particles in polishing optoelectronic components
title_sort interaction between debris particles and polishing powder wear particles in polishing optoelectronic components
url http://jnas.nbuv.gov.ua/article/UJRN-0000940299
work_keys_str_mv AT judfilatov interactionbetweendebrisparticlesandpolishingpowderwearparticlesinpolishingoptoelectroniccomponents