Interaction between debris particles and polishing powder wear particles in polishing optoelectronic components

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Bibliographic Details
Date:2018
Main Author: Ju. D. Filatov
Format: Article
Language:English
Published: 2018
Series:Superhard Materials
Online Access:http://jnas.nbuv.gov.ua/article/UJRN-0000940299
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Journal Title:Library portal of National Academy of Sciences of Ukraine | LibNAS

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Library portal of National Academy of Sciences of Ukraine | LibNAS
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spelling open-sciencenbuvgovua-297532024-02-27T21:57:16Z Interaction between debris particles and polishing powder wear particles in polishing optoelectronic components Ju. D. Filatov 0203-3119 2018 en Superhard Materials http://jnas.nbuv.gov.ua/article/UJRN-0000940299 Article
institution Library portal of National Academy of Sciences of Ukraine | LibNAS
collection Open-Science
language English
series Superhard Materials
spellingShingle Superhard Materials
Ju. D. Filatov
Interaction between debris particles and polishing powder wear particles in polishing optoelectronic components
format Article
author Ju. D. Filatov
author_facet Ju. D. Filatov
author_sort Ju. D. Filatov
title Interaction between debris particles and polishing powder wear particles in polishing optoelectronic components
title_short Interaction between debris particles and polishing powder wear particles in polishing optoelectronic components
title_full Interaction between debris particles and polishing powder wear particles in polishing optoelectronic components
title_fullStr Interaction between debris particles and polishing powder wear particles in polishing optoelectronic components
title_full_unstemmed Interaction between debris particles and polishing powder wear particles in polishing optoelectronic components
title_sort interaction between debris particles and polishing powder wear particles in polishing optoelectronic components
publishDate 2018
url http://jnas.nbuv.gov.ua/article/UJRN-0000940299
work_keys_str_mv AT judfilatov interactionbetweendebrisparticlesandpolishingpowderwearparticlesinpolishingoptoelectroniccomponents
first_indexed 2025-07-17T15:43:08Z
last_indexed 2025-07-17T15:43:08Z
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