Interaction between debris particles and polishing powder wear particles in polishing optoelectronic components
Збережено в:
| Дата: | 2018 |
|---|---|
| Автор: | |
| Формат: | Стаття |
| Мова: | English |
| Опубліковано: |
2018
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| Назва видання: | Superhard Materials |
| Онлайн доступ: | http://jnas.nbuv.gov.ua/article/UJRN-0000940299 |
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Library portal of National Academy of Sciences of Ukraine | LibNAS| id |
open-sciencenbuvgovua-29753 |
|---|---|
| record_format |
dspace |
| spelling |
open-sciencenbuvgovua-297532024-02-27T21:57:16Z Interaction between debris particles and polishing powder wear particles in polishing optoelectronic components Ju. D. Filatov 0203-3119 2018 en Superhard Materials http://jnas.nbuv.gov.ua/article/UJRN-0000940299 Article |
| institution |
Library portal of National Academy of Sciences of Ukraine | LibNAS |
| collection |
Open-Science |
| language |
English |
| series |
Superhard Materials |
| spellingShingle |
Superhard Materials Ju. D. Filatov Interaction between debris particles and polishing powder wear particles in polishing optoelectronic components |
| format |
Article |
| author |
Ju. D. Filatov |
| author_facet |
Ju. D. Filatov |
| author_sort |
Ju. D. Filatov |
| title |
Interaction between debris particles and polishing powder wear particles in polishing optoelectronic components |
| title_short |
Interaction between debris particles and polishing powder wear particles in polishing optoelectronic components |
| title_full |
Interaction between debris particles and polishing powder wear particles in polishing optoelectronic components |
| title_fullStr |
Interaction between debris particles and polishing powder wear particles in polishing optoelectronic components |
| title_full_unstemmed |
Interaction between debris particles and polishing powder wear particles in polishing optoelectronic components |
| title_sort |
interaction between debris particles and polishing powder wear particles in polishing optoelectronic components |
| publishDate |
2018 |
| url |
http://jnas.nbuv.gov.ua/article/UJRN-0000940299 |
| work_keys_str_mv |
AT judfilatov interactionbetweendebrisparticlesandpolishingpowderwearparticlesinpolishingoptoelectroniccomponents |
| first_indexed |
2024-03-30T08:27:56Z |
| last_indexed |
2024-03-30T08:27:56Z |
| _version_ |
1796880375124852736 |