Interaction between debris particles and polishing powder wear particles in polishing optoelectronic components
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| Date: | 2018 |
|---|---|
| Main Author: | |
| Format: | Article |
| Language: | English |
| Published: |
2018
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| Series: | Superhard Materials |
| Online Access: | http://jnas.nbuv.gov.ua/article/UJRN-0000940299 |
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| Journal Title: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
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Library portal of National Academy of Sciences of Ukraine | LibNAS| _version_ | 1859508055559897088 |
|---|---|
| author | Ju. D. Filatov |
| author_facet | Ju. D. Filatov |
| author_sort | Ju. D. Filatov |
| collection | Open-Science |
| first_indexed | 2025-07-17T15:43:08Z |
| format | Article |
| id | open-sciencenbuvgovua-29753 |
| institution | Library portal of National Academy of Sciences of Ukraine | LibNAS |
| language | English |
| last_indexed | 2025-07-17T15:43:08Z |
| publishDate | 2018 |
| record_format | dspace |
| series | Superhard Materials |
| spelling | open-sciencenbuvgovua-297532024-02-27T21:57:16Z Interaction between debris particles and polishing powder wear particles in polishing optoelectronic components Ju. D. Filatov 0203-3119 2018 en Superhard Materials http://jnas.nbuv.gov.ua/article/UJRN-0000940299 Article |
| spellingShingle | Superhard Materials Ju. D. Filatov Interaction between debris particles and polishing powder wear particles in polishing optoelectronic components |
| title | Interaction between debris particles and polishing powder wear particles in polishing optoelectronic components |
| title_full | Interaction between debris particles and polishing powder wear particles in polishing optoelectronic components |
| title_fullStr | Interaction between debris particles and polishing powder wear particles in polishing optoelectronic components |
| title_full_unstemmed | Interaction between debris particles and polishing powder wear particles in polishing optoelectronic components |
| title_short | Interaction between debris particles and polishing powder wear particles in polishing optoelectronic components |
| title_sort | interaction between debris particles and polishing powder wear particles in polishing optoelectronic components |
| url | http://jnas.nbuv.gov.ua/article/UJRN-0000940299 |
| work_keys_str_mv | AT judfilatov interactionbetweendebrisparticlesandpolishingpowderwearparticlesinpolishingoptoelectroniccomponents |