Study of the state of the working surface of the tool at polishing the substrate from nitride aluminum

Збережено в:
Бібліографічні деталі
Дата:2018
Автори: Yu. D. Filatov, V. I. Sydorko, S. V. Kovalov, V. A. Kovalov, Ya. Yurchyshyn, M. A. Danylchenko, A. H. Vietrov
Формат: Стаття
Мова:English
Опубліковано: 2018
Назва видання:Tooling materials science
Онлайн доступ:http://jnas.nbuv.gov.ua/article/UJRN-0001084537
Теги: Додати тег
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Назва журналу:Library portal of National Academy of Sciences of Ukraine | LibNAS

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Library portal of National Academy of Sciences of Ukraine | LibNAS
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spelling open-sciencenbuvgovua-342582024-02-27T22:15:43Z Study of the state of the working surface of the tool at polishing the substrate from nitride aluminum Yu. D. Filatov V. I. Sydorko S. V. Kovalov V. A. Kovalov Ya. Yurchyshyn M. A. Danylchenko A. H. Vietrov 2223-3938 2018 en Tooling materials science http://jnas.nbuv.gov.ua/article/UJRN-0001084537 Article
institution Library portal of National Academy of Sciences of Ukraine | LibNAS
collection Open-Science
language English
series Tooling materials science
spellingShingle Tooling materials science
Yu. D. Filatov
V. I. Sydorko
S. V. Kovalov
V. A. Kovalov
Ya. Yurchyshyn
M. A. Danylchenko
A. H. Vietrov
Study of the state of the working surface of the tool at polishing the substrate from nitride aluminum
format Article
author Yu. D. Filatov
V. I. Sydorko
S. V. Kovalov
V. A. Kovalov
Ya. Yurchyshyn
M. A. Danylchenko
A. H. Vietrov
author_facet Yu. D. Filatov
V. I. Sydorko
S. V. Kovalov
V. A. Kovalov
Ya. Yurchyshyn
M. A. Danylchenko
A. H. Vietrov
author_sort Yu. D. Filatov
title Study of the state of the working surface of the tool at polishing the substrate from nitride aluminum
title_short Study of the state of the working surface of the tool at polishing the substrate from nitride aluminum
title_full Study of the state of the working surface of the tool at polishing the substrate from nitride aluminum
title_fullStr Study of the state of the working surface of the tool at polishing the substrate from nitride aluminum
title_full_unstemmed Study of the state of the working surface of the tool at polishing the substrate from nitride aluminum
title_sort study of the state of the working surface of the tool at polishing the substrate from nitride aluminum
publishDate 2018
url http://jnas.nbuv.gov.ua/article/UJRN-0001084537
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AT svkovalov studyofthestateoftheworkingsurfaceofthetoolatpolishingthesubstratefromnitridealuminum
AT vakovalov studyofthestateoftheworkingsurfaceofthetoolatpolishingthesubstratefromnitridealuminum
AT yayurchyshyn studyofthestateoftheworkingsurfaceofthetoolatpolishingthesubstratefromnitridealuminum
AT madanylchenko studyofthestateoftheworkingsurfaceofthetoolatpolishingthesubstratefromnitridealuminum
AT ahvietrov studyofthestateoftheworkingsurfaceofthetoolatpolishingthesubstratefromnitridealuminum
first_indexed 2024-03-30T08:49:38Z
last_indexed 2024-03-30T08:49:38Z
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