Spectroscopic studies of RF discharge plasma at plasma-chemical etching of gallium nitride epitaxial structures
Збережено в:
| Дата: | 2017 |
|---|---|
| Автори: | , |
| Формат: | Стаття |
| Мова: | English |
| Опубліковано: |
2017
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| Назва видання: | Ukrainian Journal of Physics |
| Онлайн доступ: | http://jnas.nbuv.gov.ua/article/UJRN-0000703195 |
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| Назва журналу: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
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Library portal of National Academy of Sciences of Ukraine | LibNAS| id |
open-sciencenbuvgovua-35939 |
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open-sciencenbuvgovua-359392024-02-29T11:29:26Z Spectroscopic studies of RF discharge plasma at plasma-chemical etching of gallium nitride epitaxial structures V. V. Hladkovskiy O. A. Fedorovich 0372-400X 2017 en Ukrainian Journal of Physics http://jnas.nbuv.gov.ua/article/UJRN-0000703195 Article |
| institution |
Library portal of National Academy of Sciences of Ukraine | LibNAS |
| collection |
Open-Science |
| language |
English |
| series |
Ukrainian Journal of Physics |
| spellingShingle |
Ukrainian Journal of Physics V. V. Hladkovskiy O. A. Fedorovich Spectroscopic studies of RF discharge plasma at plasma-chemical etching of gallium nitride epitaxial structures |
| format |
Article |
| author |
V. V. Hladkovskiy O. A. Fedorovich |
| author_facet |
V. V. Hladkovskiy O. A. Fedorovich |
| author_sort |
V. V. Hladkovskiy |
| title |
Spectroscopic studies of RF discharge plasma at plasma-chemical etching of gallium nitride epitaxial structures |
| title_short |
Spectroscopic studies of RF discharge plasma at plasma-chemical etching of gallium nitride epitaxial structures |
| title_full |
Spectroscopic studies of RF discharge plasma at plasma-chemical etching of gallium nitride epitaxial structures |
| title_fullStr |
Spectroscopic studies of RF discharge plasma at plasma-chemical etching of gallium nitride epitaxial structures |
| title_full_unstemmed |
Spectroscopic studies of RF discharge plasma at plasma-chemical etching of gallium nitride epitaxial structures |
| title_sort |
spectroscopic studies of rf discharge plasma at plasma-chemical etching of gallium nitride epitaxial structures |
| publishDate |
2017 |
| url |
http://jnas.nbuv.gov.ua/article/UJRN-0000703195 |
| work_keys_str_mv |
AT vvhladkovskiy spectroscopicstudiesofrfdischargeplasmaatplasmachemicaletchingofgalliumnitrideepitaxialstructures AT oafedorovich spectroscopicstudiesofrfdischargeplasmaatplasmachemicaletchingofgalliumnitrideepitaxialstructures |
| first_indexed |
2025-07-17T18:06:13Z |
| last_indexed |
2025-07-17T18:06:13Z |
| _version_ |
1850414899587448832 |