Spectroscopic studies of RF discharge plasma at plasma-chemical etching of gallium nitride epitaxial structures
Збережено в:
| Дата: | 2017 |
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| Автори: | , |
| Формат: | Стаття |
| Мова: | Англійська |
| Опубліковано: |
2017
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| Назва видання: | Ukrainian Journal of Physics |
| Онлайн доступ: | http://jnas.nbuv.gov.ua/article/UJRN-0000703195 |
| Теги: |
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| Назва журналу: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
Репозитарії
Library portal of National Academy of Sciences of Ukraine | LibNAS| _version_ | 1859508986096648192 |
|---|---|
| author | V. V. Hladkovskiy O. A. Fedorovich |
| author_facet | V. V. Hladkovskiy O. A. Fedorovich |
| author_sort | V. V. Hladkovskiy |
| collection | Open-Science |
| first_indexed | 2025-07-17T18:06:13Z |
| format | Article |
| id | open-sciencenbuvgovua-35939 |
| institution | Library portal of National Academy of Sciences of Ukraine | LibNAS |
| language | English |
| last_indexed | 2025-07-17T18:06:13Z |
| publishDate | 2017 |
| record_format | dspace |
| series | Ukrainian Journal of Physics |
| spelling | open-sciencenbuvgovua-359392024-02-29T11:29:26Z Spectroscopic studies of RF discharge plasma at plasma-chemical etching of gallium nitride epitaxial structures V. V. Hladkovskiy O. A. Fedorovich 0372-400X 2017 en Ukrainian Journal of Physics http://jnas.nbuv.gov.ua/article/UJRN-0000703195 Article |
| spellingShingle | Ukrainian Journal of Physics V. V. Hladkovskiy O. A. Fedorovich Spectroscopic studies of RF discharge plasma at plasma-chemical etching of gallium nitride epitaxial structures |
| title | Spectroscopic studies of RF discharge plasma at plasma-chemical etching of gallium nitride epitaxial structures |
| title_full | Spectroscopic studies of RF discharge plasma at plasma-chemical etching of gallium nitride epitaxial structures |
| title_fullStr | Spectroscopic studies of RF discharge plasma at plasma-chemical etching of gallium nitride epitaxial structures |
| title_full_unstemmed | Spectroscopic studies of RF discharge plasma at plasma-chemical etching of gallium nitride epitaxial structures |
| title_short | Spectroscopic studies of RF discharge plasma at plasma-chemical etching of gallium nitride epitaxial structures |
| title_sort | spectroscopic studies of rf discharge plasma at plasma-chemical etching of gallium nitride epitaxial structures |
| url | http://jnas.nbuv.gov.ua/article/UJRN-0000703195 |
| work_keys_str_mv | AT vvhladkovskiy spectroscopicstudiesofrfdischargeplasmaatplasmachemicaletchingofgalliumnitrideepitaxialstructures AT oafedorovich spectroscopicstudiesofrfdischargeplasmaatplasmachemicaletchingofgalliumnitrideepitaxialstructures |