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Spectroscopic studies of RF discharge plasma at plasma-chemical etching of gallium nitride epitaxial structures

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Bibliographic Details
Date:	2017
Main Authors:	V. V. Hladkovskiy, O. A. Fedorovich
Format:	Article
Language:	English
Published:	2017
Series:	Ukrainian Journal of Physics
Online Access:	http://jnas.nbuv.gov.ua/article/UJRN-0000703195
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Journal Title:	Library portal of National Academy of Sciences of Ukraine \| LibNAS

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Library portal of National Academy of Sciences of Ukraine | LibNAS

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