Hladkovskiy, V. V., & Fedorovich, O. A. (2017). Spectroscopic studies of RF discharge plasma at plasma-chemical etching of gallium nitride epitaxial structures.
Chicago Style (17th ed.) CitationHladkovskiy, V. V., and O. A. Fedorovich. Spectroscopic Studies of RF Discharge Plasma at Plasma-chemical Etching of Gallium Nitride Epitaxial Structures. 2017.
MLA (8th ed.) CitationHladkovskiy, V. V., and O. A. Fedorovich. Spectroscopic Studies of RF Discharge Plasma at Plasma-chemical Etching of Gallium Nitride Epitaxial Structures. 2017.
Warning: These citations may not always be 100% accurate.