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Spectroscopic studies of RF discharge plasma at plasma-chemical etching of gallium nitride epitaxial structures

Spectroscopic studies of RF discharge plasma at plasma-chemical etching of gallium nitride epitaxial structures

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Bibliographic Details
Main Authors: V. V. Hladkovskiy, O. A. Fedorovich
Format: Article
Language:English
Published: 2017
Series:Ukrainian journal of physics
Online Access:http://jnas.nbuv.gov.ua/article/UJRN-0000703424
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spelling open-sciencenbuvgovua-359632024-02-29T11:29:35Z Spectroscopic studies of RF discharge plasma at plasma-chemical etching of gallium nitride epitaxial structures V. V. Hladkovskiy O. A. Fedorovich 2071-0186 2017 en Ukrainian journal of physics http://jnas.nbuv.gov.ua/article/UJRN-0000703424 Article
institution Library portal of National Academy of Sciences of Ukraine | LibNAS
collection Open-Science
language English
series Ukrainian journal of physics
spellingShingle Ukrainian journal of physics
V. V. Hladkovskiy
O. A. Fedorovich
Spectroscopic studies of RF discharge plasma at plasma-chemical etching of gallium nitride epitaxial structures
format Article
author V. V. Hladkovskiy
O. A. Fedorovich
author_facet V. V. Hladkovskiy
O. A. Fedorovich
author_sort V. V. Hladkovskiy
title Spectroscopic studies of RF discharge plasma at plasma-chemical etching of gallium nitride epitaxial structures
title_short Spectroscopic studies of RF discharge plasma at plasma-chemical etching of gallium nitride epitaxial structures
title_full Spectroscopic studies of RF discharge plasma at plasma-chemical etching of gallium nitride epitaxial structures
title_fullStr Spectroscopic studies of RF discharge plasma at plasma-chemical etching of gallium nitride epitaxial structures
title_full_unstemmed Spectroscopic studies of RF discharge plasma at plasma-chemical etching of gallium nitride epitaxial structures
title_sort spectroscopic studies of rf discharge plasma at plasma-chemical etching of gallium nitride epitaxial structures
publishDate 2017
url http://jnas.nbuv.gov.ua/article/UJRN-0000703424
work_keys_str_mv AT vvhladkovskiy spectroscopicstudiesofrfdischargeplasmaatplasmachemicaletchingofgalliumnitrideepitaxialstructures
AT oafedorovich spectroscopicstudiesofrfdischargeplasmaatplasmachemicaletchingofgalliumnitrideepitaxialstructures
first_indexed 2024-03-30T08:58:31Z
last_indexed 2024-03-30T08:58:31Z
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