Spectroscopic studies of RF discharge plasma at plasma-chemical etching of gallium nitride epitaxial structures
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| Datum: | 2017 |
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| Hauptverfasser: | , |
| Format: | Artikel |
| Sprache: | Englisch |
| Veröffentlicht: |
2017
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| Schriftenreihe: | Ukrainian journal of physics |
| Online Zugang: | http://jnas.nbuv.gov.ua/article/UJRN-0000703424 |
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| Назва журналу: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
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Library portal of National Academy of Sciences of Ukraine | LibNAS| _version_ | 1859508987729281024 |
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| author | V. V. Hladkovskiy O. A. Fedorovich |
| author_facet | V. V. Hladkovskiy O. A. Fedorovich |
| author_sort | V. V. Hladkovskiy |
| collection | Open-Science |
| first_indexed | 2025-07-17T18:06:27Z |
| format | Article |
| id | open-sciencenbuvgovua-35963 |
| institution | Library portal of National Academy of Sciences of Ukraine | LibNAS |
| language | English |
| last_indexed | 2025-07-17T18:06:27Z |
| publishDate | 2017 |
| record_format | dspace |
| series | Ukrainian journal of physics |
| spelling | open-sciencenbuvgovua-359632024-02-29T11:29:35Z Spectroscopic studies of RF discharge plasma at plasma-chemical etching of gallium nitride epitaxial structures V. V. Hladkovskiy O. A. Fedorovich 2071-0186 2017 en Ukrainian journal of physics http://jnas.nbuv.gov.ua/article/UJRN-0000703424 Article |
| spellingShingle | Ukrainian journal of physics V. V. Hladkovskiy O. A. Fedorovich Spectroscopic studies of RF discharge plasma at plasma-chemical etching of gallium nitride epitaxial structures |
| title | Spectroscopic studies of RF discharge plasma at plasma-chemical etching of gallium nitride epitaxial structures |
| title_full | Spectroscopic studies of RF discharge plasma at plasma-chemical etching of gallium nitride epitaxial structures |
| title_fullStr | Spectroscopic studies of RF discharge plasma at plasma-chemical etching of gallium nitride epitaxial structures |
| title_full_unstemmed | Spectroscopic studies of RF discharge plasma at plasma-chemical etching of gallium nitride epitaxial structures |
| title_short | Spectroscopic studies of RF discharge plasma at plasma-chemical etching of gallium nitride epitaxial structures |
| title_sort | spectroscopic studies of rf discharge plasma at plasma-chemical etching of gallium nitride epitaxial structures |
| url | http://jnas.nbuv.gov.ua/article/UJRN-0000703424 |
| work_keys_str_mv | AT vvhladkovskiy spectroscopicstudiesofrfdischargeplasmaatplasmachemicaletchingofgalliumnitrideepitaxialstructures AT oafedorovich spectroscopicstudiesofrfdischargeplasmaatplasmachemicaletchingofgalliumnitrideepitaxialstructures |