Spectroscopic studies of RF discharge plasma at plasma-chemical etching of gallium nitride epitaxial structures
Saved in:
| Date: | 2017 |
|---|---|
| Main Authors: | , |
| Format: | Article |
| Language: | English |
| Published: |
2017
|
| Series: | Ukrainian journal of physics |
| Online Access: | http://jnas.nbuv.gov.ua/article/UJRN-0000703424 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| Journal Title: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
Institution
Library portal of National Academy of Sciences of Ukraine | LibNAS| id |
open-sciencenbuvgovua-35963 |
|---|---|
| record_format |
dspace |
| spelling |
open-sciencenbuvgovua-359632024-02-29T11:29:35Z Spectroscopic studies of RF discharge plasma at plasma-chemical etching of gallium nitride epitaxial structures V. V. Hladkovskiy O. A. Fedorovich 2071-0186 2017 en Ukrainian journal of physics http://jnas.nbuv.gov.ua/article/UJRN-0000703424 Article |
| institution |
Library portal of National Academy of Sciences of Ukraine | LibNAS |
| collection |
Open-Science |
| language |
English |
| series |
Ukrainian journal of physics |
| spellingShingle |
Ukrainian journal of physics V. V. Hladkovskiy O. A. Fedorovich Spectroscopic studies of RF discharge plasma at plasma-chemical etching of gallium nitride epitaxial structures |
| format |
Article |
| author |
V. V. Hladkovskiy O. A. Fedorovich |
| author_facet |
V. V. Hladkovskiy O. A. Fedorovich |
| author_sort |
V. V. Hladkovskiy |
| title |
Spectroscopic studies of RF discharge plasma at plasma-chemical etching of gallium nitride epitaxial structures |
| title_short |
Spectroscopic studies of RF discharge plasma at plasma-chemical etching of gallium nitride epitaxial structures |
| title_full |
Spectroscopic studies of RF discharge plasma at plasma-chemical etching of gallium nitride epitaxial structures |
| title_fullStr |
Spectroscopic studies of RF discharge plasma at plasma-chemical etching of gallium nitride epitaxial structures |
| title_full_unstemmed |
Spectroscopic studies of RF discharge plasma at plasma-chemical etching of gallium nitride epitaxial structures |
| title_sort |
spectroscopic studies of rf discharge plasma at plasma-chemical etching of gallium nitride epitaxial structures |
| publishDate |
2017 |
| url |
http://jnas.nbuv.gov.ua/article/UJRN-0000703424 |
| work_keys_str_mv |
AT vvhladkovskiy spectroscopicstudiesofrfdischargeplasmaatplasmachemicaletchingofgalliumnitrideepitaxialstructures AT oafedorovich spectroscopicstudiesofrfdischargeplasmaatplasmachemicaletchingofgalliumnitrideepitaxialstructures |
| first_indexed |
2025-07-17T18:06:27Z |
| last_indexed |
2025-07-17T18:06:27Z |
| _version_ |
1850414902178480128 |