Model of smoothing roughness on GaAs wafer surface by using nonabrasive chemical-and-mechanical polishing
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| Date: | 2017 |
|---|---|
| Main Authors: | , , , |
| Format: | Article |
| Language: | English |
| Published: |
2017
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| Series: | Semiconductor Physics, Quantum Electronics and Optoelectronics |
| Online Access: | http://jnas.nbuv.gov.ua/article/UJRN-0000714494 |
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| Journal Title: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
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Library portal of National Academy of Sciences of Ukraine | LibNAS| _version_ | 1859509029006475264 |
|---|---|
| author | A. V. Fomin G. A. Pashchenko Yu. Kravetskyi I. G. Lutsyshyn |
| author_facet | A. V. Fomin G. A. Pashchenko Yu. Kravetskyi I. G. Lutsyshyn |
| author_sort | A. V. Fomin |
| collection | Open-Science |
| first_indexed | 2025-07-17T18:11:10Z |
| format | Article |
| id | open-sciencenbuvgovua-36194 |
| institution | Library portal of National Academy of Sciences of Ukraine | LibNAS |
| language | English |
| last_indexed | 2025-07-17T18:11:10Z |
| publishDate | 2017 |
| record_format | dspace |
| series | Semiconductor Physics, Quantum Electronics and Optoelectronics |
| spelling | open-sciencenbuvgovua-361942024-02-29T11:30:56Z Model of smoothing roughness on GaAs wafer surface by using nonabrasive chemical-and-mechanical polishing A. V. Fomin G. A. Pashchenko Yu. Kravetskyi I. G. Lutsyshyn 1560-8034 2017 en Semiconductor Physics, Quantum Electronics and Optoelectronics http://jnas.nbuv.gov.ua/article/UJRN-0000714494 Article |
| spellingShingle | Semiconductor Physics, Quantum Electronics and Optoelectronics A. V. Fomin G. A. Pashchenko Yu. Kravetskyi I. G. Lutsyshyn Model of smoothing roughness on GaAs wafer surface by using nonabrasive chemical-and-mechanical polishing |
| title | Model of smoothing roughness on GaAs wafer surface by using nonabrasive chemical-and-mechanical polishing |
| title_full | Model of smoothing roughness on GaAs wafer surface by using nonabrasive chemical-and-mechanical polishing |
| title_fullStr | Model of smoothing roughness on GaAs wafer surface by using nonabrasive chemical-and-mechanical polishing |
| title_full_unstemmed | Model of smoothing roughness on GaAs wafer surface by using nonabrasive chemical-and-mechanical polishing |
| title_short | Model of smoothing roughness on GaAs wafer surface by using nonabrasive chemical-and-mechanical polishing |
| title_sort | model of smoothing roughness on gaas wafer surface by using nonabrasive chemical-and-mechanical polishing |
| url | http://jnas.nbuv.gov.ua/article/UJRN-0000714494 |
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