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Model of smoothing roughness on GaAs wafer surface by using nonabrasive chemical-and-mechanical polishing

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Bibliographic Details
Date:	2017
Main Authors:	A. V. Fomin, G. A. Pashchenko, Yu. Kravetskyi, I. G. Lutsyshyn
Format:	Article
Language:	English
Published:	2017
Series:	Semiconductor Physics, Quantum Electronics and Optoelectronics
Online Access:	http://jnas.nbuv.gov.ua/article/UJRN-0000714494
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Journal Title:	Library portal of National Academy of Sciences of Ukraine \| LibNAS

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Library portal of National Academy of Sciences of Ukraine | LibNAS

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