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Modeling of X-ray rocking curves for layers after two-stage ion-implantation

Modeling of X-ray rocking curves for layers after two-stage ion-implantation

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Bibliographic Details
Main Authors: O. I. Liubchenko, V. P. Kladko, Yo. Gudymenko
Format: Article
Language:English
Published: 2017
Series:Semiconductor Physics, Quantum Electronics and Optoelectronics
Online Access:http://jnas.nbuv.gov.ua/article/UJRN-0000778515
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id open-sciencenbuvgovua-38404
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spelling open-sciencenbuvgovua-384042024-02-29T11:41:19Z Modeling of X-ray rocking curves for layers after two-stage ion-implantation O. I. Liubchenko V. P. Kladko Yo. Gudymenko 1560-8034 2017 en Semiconductor Physics, Quantum Electronics and Optoelectronics http://jnas.nbuv.gov.ua/article/UJRN-0000778515 Article
institution Library portal of National Academy of Sciences of Ukraine | LibNAS
collection Open-Science
language English
series Semiconductor Physics, Quantum Electronics and Optoelectronics
spellingShingle Semiconductor Physics, Quantum Electronics and Optoelectronics
O. I. Liubchenko
V. P. Kladko
Yo. Gudymenko
Modeling of X-ray rocking curves for layers after two-stage ion-implantation
format Article
author O. I. Liubchenko
V. P. Kladko
Yo. Gudymenko
author_facet O. I. Liubchenko
V. P. Kladko
Yo. Gudymenko
author_sort O. I. Liubchenko
title Modeling of X-ray rocking curves for layers after two-stage ion-implantation
title_short Modeling of X-ray rocking curves for layers after two-stage ion-implantation
title_full Modeling of X-ray rocking curves for layers after two-stage ion-implantation
title_fullStr Modeling of X-ray rocking curves for layers after two-stage ion-implantation
title_full_unstemmed Modeling of X-ray rocking curves for layers after two-stage ion-implantation
title_sort modeling of x-ray rocking curves for layers after two-stage ion-implantation
publishDate 2017
url http://jnas.nbuv.gov.ua/article/UJRN-0000778515
work_keys_str_mv AT oiliubchenko modelingofxrayrockingcurvesforlayersaftertwostageionimplantation
AT vpkladko modelingofxrayrockingcurvesforlayersaftertwostageionimplantation
AT yogudymenko modelingofxrayrockingcurvesforlayersaftertwostageionimplantation
first_indexed 2024-03-30T09:10:35Z
last_indexed 2024-03-30T09:10:35Z
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