Modeling of X-ray rocking curves for layers after two-stage ion-implantation
Збережено в:
| Дата: | 2017 |
|---|---|
| Автори: | , , |
| Формат: | Стаття |
| Мова: | Англійська |
| Опубліковано: |
2017
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| Назва видання: | Semiconductor Physics, Quantum Electronics and Optoelectronics |
| Онлайн доступ: | http://jnas.nbuv.gov.ua/article/UJRN-0000778515 |
| Теги: |
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| Назва журналу: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
Репозитарії
Library portal of National Academy of Sciences of Ukraine | LibNAS| _version_ | 1859509434233913344 |
|---|---|
| author | O. I. Liubchenko V. P. Kladko Yo. Gudymenko |
| author_facet | O. I. Liubchenko V. P. Kladko Yo. Gudymenko |
| author_sort | O. I. Liubchenko |
| collection | Open-Science |
| first_indexed | 2025-07-17T18:57:40Z |
| format | Article |
| id | open-sciencenbuvgovua-38404 |
| institution | Library portal of National Academy of Sciences of Ukraine | LibNAS |
| language | English |
| last_indexed | 2025-07-17T18:57:40Z |
| publishDate | 2017 |
| record_format | dspace |
| series | Semiconductor Physics, Quantum Electronics and Optoelectronics |
| spelling | open-sciencenbuvgovua-384042024-02-29T11:41:19Z Modeling of X-ray rocking curves for layers after two-stage ion-implantation O. I. Liubchenko V. P. Kladko Yo. Gudymenko 1560-8034 2017 en Semiconductor Physics, Quantum Electronics and Optoelectronics http://jnas.nbuv.gov.ua/article/UJRN-0000778515 Article |
| spellingShingle | Semiconductor Physics, Quantum Electronics and Optoelectronics O. I. Liubchenko V. P. Kladko Yo. Gudymenko Modeling of X-ray rocking curves for layers after two-stage ion-implantation |
| title | Modeling of X-ray rocking curves for layers after two-stage ion-implantation |
| title_full | Modeling of X-ray rocking curves for layers after two-stage ion-implantation |
| title_fullStr | Modeling of X-ray rocking curves for layers after two-stage ion-implantation |
| title_full_unstemmed | Modeling of X-ray rocking curves for layers after two-stage ion-implantation |
| title_short | Modeling of X-ray rocking curves for layers after two-stage ion-implantation |
| title_sort | modeling of x-ray rocking curves for layers after two-stage ion-implantation |
| url | http://jnas.nbuv.gov.ua/article/UJRN-0000778515 |
| work_keys_str_mv | AT oiliubchenko modelingofxrayrockingcurvesforlayersaftertwostageionimplantation AT vpkladko modelingofxrayrockingcurvesforlayersaftertwostageionimplantation AT yogudymenko modelingofxrayrockingcurvesforlayersaftertwostageionimplantation |