Modeling of X-ray rocking curves for layers after two-stage ion-implantation
Збережено в:
| Дата: | 2017 |
|---|---|
| Автори: | , , |
| Формат: | Стаття |
| Мова: | English |
| Опубліковано: |
2017
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| Назва видання: | Semiconductor Physics, Quantum Electronics and Optoelectronics |
| Онлайн доступ: | http://jnas.nbuv.gov.ua/article/UJRN-0000778515 |
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| Назва журналу: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
Репозитарії
Library portal of National Academy of Sciences of Ukraine | LibNAS| id |
open-sciencenbuvgovua-38404 |
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| record_format |
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| spelling |
open-sciencenbuvgovua-384042024-02-29T11:41:19Z Modeling of X-ray rocking curves for layers after two-stage ion-implantation O. I. Liubchenko V. P. Kladko Yo. Gudymenko 1560-8034 2017 en Semiconductor Physics, Quantum Electronics and Optoelectronics http://jnas.nbuv.gov.ua/article/UJRN-0000778515 Article |
| institution |
Library portal of National Academy of Sciences of Ukraine | LibNAS |
| collection |
Open-Science |
| language |
English |
| series |
Semiconductor Physics, Quantum Electronics and Optoelectronics |
| spellingShingle |
Semiconductor Physics, Quantum Electronics and Optoelectronics O. I. Liubchenko V. P. Kladko Yo. Gudymenko Modeling of X-ray rocking curves for layers after two-stage ion-implantation |
| format |
Article |
| author |
O. I. Liubchenko V. P. Kladko Yo. Gudymenko |
| author_facet |
O. I. Liubchenko V. P. Kladko Yo. Gudymenko |
| author_sort |
O. I. Liubchenko |
| title |
Modeling of X-ray rocking curves for layers after two-stage ion-implantation |
| title_short |
Modeling of X-ray rocking curves for layers after two-stage ion-implantation |
| title_full |
Modeling of X-ray rocking curves for layers after two-stage ion-implantation |
| title_fullStr |
Modeling of X-ray rocking curves for layers after two-stage ion-implantation |
| title_full_unstemmed |
Modeling of X-ray rocking curves for layers after two-stage ion-implantation |
| title_sort |
modeling of x-ray rocking curves for layers after two-stage ion-implantation |
| publishDate |
2017 |
| url |
http://jnas.nbuv.gov.ua/article/UJRN-0000778515 |
| work_keys_str_mv |
AT oiliubchenko modelingofxrayrockingcurvesforlayersaftertwostageionimplantation AT vpkladko modelingofxrayrockingcurvesforlayersaftertwostageionimplantation AT yogudymenko modelingofxrayrockingcurvesforlayersaftertwostageionimplantation |
| first_indexed |
2024-03-30T09:10:35Z |
| last_indexed |
2024-03-30T09:10:35Z |
| _version_ |
1796881279043502080 |