Modeling of X-ray rocking curves for layers after two-stage ion-implantation

Modeling of X-ray rocking curves for layers after two-stage ion-implantation

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Bibliographische Detailangaben
Datum:	2017
Hauptverfasser:	O. I. Liubchenko, V. P. Kladko, Yo. Gudymenko
Format:	Artikel
Sprache:	English
Veröffentlicht:	2017
Schriftenreihe:	Semiconductor Physics, Quantum Electronics and Optoelectronics
Online Zugang:	http://jnas.nbuv.gov.ua/article/UJRN-0000778515
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!
Назва журналу:	Library portal of National Academy of Sciences of Ukraine \| LibNAS

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Library portal of National Academy of Sciences of Ukraine | LibNAS

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