Formation of flat surfaces of optoelectronic components in diamond polishing

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Бібліографічні деталі
Дата:2017
Автори: Ju. D. Filatov, V. I. Sidorko, S. V. Kovalev, A. G. Vetrov
Формат: Стаття
Мова:English
Опубліковано: 2017
Назва видання:Superhard Materials
Онлайн доступ:http://jnas.nbuv.gov.ua/article/UJRN-0000850127
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Назва журналу:Library portal of National Academy of Sciences of Ukraine | LibNAS

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Library portal of National Academy of Sciences of Ukraine | LibNAS
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spelling open-sciencenbuvgovua-419592024-02-29T11:56:38Z Formation of flat surfaces of optoelectronic components in diamond polishing Ju. D. Filatov V. I. Sidorko S. V. Kovalev A. G. Vetrov 0203-3119 2017 en Superhard Materials http://jnas.nbuv.gov.ua/article/UJRN-0000850127 Article
institution Library portal of National Academy of Sciences of Ukraine | LibNAS
collection Open-Science
language English
series Superhard Materials
spellingShingle Superhard Materials
Ju. D. Filatov
V. I. Sidorko
S. V. Kovalev
A. G. Vetrov
Formation of flat surfaces of optoelectronic components in diamond polishing
format Article
author Ju. D. Filatov
V. I. Sidorko
S. V. Kovalev
A. G. Vetrov
author_facet Ju. D. Filatov
V. I. Sidorko
S. V. Kovalev
A. G. Vetrov
author_sort Ju. D. Filatov
title Formation of flat surfaces of optoelectronic components in diamond polishing
title_short Formation of flat surfaces of optoelectronic components in diamond polishing
title_full Formation of flat surfaces of optoelectronic components in diamond polishing
title_fullStr Formation of flat surfaces of optoelectronic components in diamond polishing
title_full_unstemmed Formation of flat surfaces of optoelectronic components in diamond polishing
title_sort formation of flat surfaces of optoelectronic components in diamond polishing
publishDate 2017
url http://jnas.nbuv.gov.ua/article/UJRN-0000850127
work_keys_str_mv AT judfilatov formationofflatsurfacesofoptoelectroniccomponentsindiamondpolishing
AT visidorko formationofflatsurfacesofoptoelectroniccomponentsindiamondpolishing
AT svkovalev formationofflatsurfacesofoptoelectroniccomponentsindiamondpolishing
AT agvetrov formationofflatsurfacesofoptoelectroniccomponentsindiamondpolishing
first_indexed 2024-03-30T09:29:44Z
last_indexed 2024-03-30T09:29:44Z
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