IR spectroscopic study of thin ZnO films grown using the atomic layer deposition method
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| Datum: | 2016 |
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| Hauptverfasser: | , , , |
| Format: | Artikel |
| Sprache: | English |
| Veröffentlicht: |
2016
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| Schriftenreihe: | Ukrainian Journal of Physics |
| Online Zugang: | http://jnas.nbuv.gov.ua/article/UJRN-0000674436 |
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| Назва журналу: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
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open-sciencenbuvgovua-513182024-02-29T13:00:33Z IR spectroscopic study of thin ZnO films grown using the atomic layer deposition method Ye. F. Venher Yu. Melnychuk O. V. Melnychuk T. V. Semikina 0372-400X 2016 en Ukrainian Journal of Physics http://jnas.nbuv.gov.ua/article/UJRN-0000674436 Article |
| institution |
Library portal of National Academy of Sciences of Ukraine | LibNAS |
| collection |
Open-Science |
| language |
English |
| series |
Ukrainian Journal of Physics |
| spellingShingle |
Ukrainian Journal of Physics Ye. F. Venher Yu. Melnychuk O. V. Melnychuk T. V. Semikina IR spectroscopic study of thin ZnO films grown using the atomic layer deposition method |
| format |
Article |
| author |
Ye. F. Venher Yu. Melnychuk O. V. Melnychuk T. V. Semikina |
| author_facet |
Ye. F. Venher Yu. Melnychuk O. V. Melnychuk T. V. Semikina |
| author_sort |
Ye. F. Venher |
| title |
IR spectroscopic study of thin ZnO films grown using the atomic layer deposition method |
| title_short |
IR spectroscopic study of thin ZnO films grown using the atomic layer deposition method |
| title_full |
IR spectroscopic study of thin ZnO films grown using the atomic layer deposition method |
| title_fullStr |
IR spectroscopic study of thin ZnO films grown using the atomic layer deposition method |
| title_full_unstemmed |
IR spectroscopic study of thin ZnO films grown using the atomic layer deposition method |
| title_sort |
ir spectroscopic study of thin zno films grown using the atomic layer deposition method |
| publishDate |
2016 |
| url |
http://jnas.nbuv.gov.ua/article/UJRN-0000674436 |
| work_keys_str_mv |
AT yefvenher irspectroscopicstudyofthinznofilmsgrownusingtheatomiclayerdepositionmethod AT yumelnychuk irspectroscopicstudyofthinznofilmsgrownusingtheatomiclayerdepositionmethod AT ovmelnychuk irspectroscopicstudyofthinznofilmsgrownusingtheatomiclayerdepositionmethod AT tvsemikina irspectroscopicstudyofthinznofilmsgrownusingtheatomiclayerdepositionmethod |
| first_indexed |
2025-07-17T22:41:23Z |
| last_indexed |
2025-07-17T22:41:23Z |
| _version_ |
1850416596693024768 |