IR spectroscopic study of thin ZnO films grown using the atomic layer deposition method

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Datum:2016
Hauptverfasser: Ye. F. Venher, Yu. Melnychuk, O. V. Melnychuk, T. V. Semikina
Format: Artikel
Sprache:Englisch
Veröffentlicht: 2016
Schriftenreihe:Ukrainian Journal of Physics
Online Zugang:http://jnas.nbuv.gov.ua/article/UJRN-0000674436
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Назва журналу:Library portal of National Academy of Sciences of Ukraine | LibNAS

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Library portal of National Academy of Sciences of Ukraine | LibNAS
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author Ye. F. Venher
Yu. Melnychuk
O. V. Melnychuk
T. V. Semikina
author_facet Ye. F. Venher
Yu. Melnychuk
O. V. Melnychuk
T. V. Semikina
author_sort Ye. F. Venher
collection Open-Science
first_indexed 2025-07-17T22:41:23Z
format Article
id open-sciencenbuvgovua-51318
institution Library portal of National Academy of Sciences of Ukraine | LibNAS
language English
last_indexed 2025-07-17T22:41:23Z
publishDate 2016
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series Ukrainian Journal of Physics
spelling open-sciencenbuvgovua-513182024-02-29T13:00:33Z IR spectroscopic study of thin ZnO films grown using the atomic layer deposition method Ye. F. Venher Yu. Melnychuk O. V. Melnychuk T. V. Semikina 0372-400X 2016 en Ukrainian Journal of Physics http://jnas.nbuv.gov.ua/article/UJRN-0000674436 Article
spellingShingle Ukrainian Journal of Physics
Ye. F. Venher
Yu. Melnychuk
O. V. Melnychuk
T. V. Semikina
IR spectroscopic study of thin ZnO films grown using the atomic layer deposition method
title IR spectroscopic study of thin ZnO films grown using the atomic layer deposition method
title_full IR spectroscopic study of thin ZnO films grown using the atomic layer deposition method
title_fullStr IR spectroscopic study of thin ZnO films grown using the atomic layer deposition method
title_full_unstemmed IR spectroscopic study of thin ZnO films grown using the atomic layer deposition method
title_short IR spectroscopic study of thin ZnO films grown using the atomic layer deposition method
title_sort ir spectroscopic study of thin zno films grown using the atomic layer deposition method
url http://jnas.nbuv.gov.ua/article/UJRN-0000674436
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AT yumelnychuk irspectroscopicstudyofthinznofilmsgrownusingtheatomiclayerdepositionmethod
AT ovmelnychuk irspectroscopicstudyofthinznofilmsgrownusingtheatomiclayerdepositionmethod
AT tvsemikina irspectroscopicstudyofthinznofilmsgrownusingtheatomiclayerdepositionmethod