Filatov, J. D., Sidorko, V. I., Kovalev, S. V., Kovalev, V. A., Jurchishin, J., & Vetrov, A. G. (2016). Precision shaping flat surfaces details of optics and microelectronics when polishing.
Chicago Style (17th ed.) CitationFilatov, Ju. D., V. I. Sidorko, S. V. Kovalev, V. A. Kovalev, Ja Jurchishin, and A. G. Vetrov. Precision Shaping Flat Surfaces Details of Optics and Microelectronics When Polishing. 2016.
MLA (8th ed.) CitationFilatov, Ju. D., et al. Precision Shaping Flat Surfaces Details of Optics and Microelectronics When Polishing. 2016.
Warning: These citations may not always be 100% accurate.