Precision shaping flat surfaces details of optics and microelectronics when polishing
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| Datum: | 2016 |
|---|---|
| Hauptverfasser: | , , , , , |
| Format: | Artikel |
| Sprache: | Englisch |
| Veröffentlicht: |
2016
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| Schriftenreihe: | Tooling materials science |
| Online Zugang: | http://jnas.nbuv.gov.ua/article/UJRN-0000713088 |
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| Назва журналу: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
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Library portal of National Academy of Sciences of Ukraine | LibNAS| _version_ | 1859516184452399104 |
|---|---|
| author | Ju. D. Filatov V. I. Sidorko S. V. Kovalev V. A. Kovalev Ja. Jurchishin A. G. Vetrov |
| author_facet | Ju. D. Filatov V. I. Sidorko S. V. Kovalev V. A. Kovalev Ja. Jurchishin A. G. Vetrov |
| author_sort | Ju. D. Filatov |
| collection | Open-Science |
| first_indexed | 2025-07-17T22:57:41Z |
| format | Article |
| id | open-sciencenbuvgovua-52139 |
| institution | Library portal of National Academy of Sciences of Ukraine | LibNAS |
| language | English |
| last_indexed | 2025-07-17T22:57:41Z |
| publishDate | 2016 |
| record_format | dspace |
| series | Tooling materials science |
| spelling | open-sciencenbuvgovua-521392024-02-29T13:04:49Z Precision shaping flat surfaces details of optics and microelectronics when polishing Ju. D. Filatov V. I. Sidorko S. V. Kovalev V. A. Kovalev Ja. Jurchishin A. G. Vetrov 2223-3938 2016 en Tooling materials science http://jnas.nbuv.gov.ua/article/UJRN-0000713088 Article |
| spellingShingle | Tooling materials science Ju. D. Filatov V. I. Sidorko S. V. Kovalev V. A. Kovalev Ja. Jurchishin A. G. Vetrov Precision shaping flat surfaces details of optics and microelectronics when polishing |
| title | Precision shaping flat surfaces details of optics and microelectronics when polishing |
| title_full | Precision shaping flat surfaces details of optics and microelectronics when polishing |
| title_fullStr | Precision shaping flat surfaces details of optics and microelectronics when polishing |
| title_full_unstemmed | Precision shaping flat surfaces details of optics and microelectronics when polishing |
| title_short | Precision shaping flat surfaces details of optics and microelectronics when polishing |
| title_sort | precision shaping flat surfaces details of optics and microelectronics when polishing |
| url | http://jnas.nbuv.gov.ua/article/UJRN-0000713088 |
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