Effect of argon deposition pressure on the properties of aluminum-doped ZnO films deposited layer-by-layer using magnetron sputtering
Збережено в:
| Дата: | 2016 |
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| Автори: | , , , , , , , , , , , |
| Формат: | Стаття |
| Мова: | English |
| Опубліковано: |
2016
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| Назва видання: | Ukrainian Journal of Physics |
| Онлайн доступ: | http://jnas.nbuv.gov.ua/article/UJRN-0000732262 |
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| Назва журналу: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
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Library portal of National Academy of Sciences of Ukraine | LibNAS| id |
open-sciencenbuvgovua-52491 |
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open-sciencenbuvgovua-524912024-02-29T13:06:52Z Effect of argon deposition pressure on the properties of aluminum-doped ZnO films deposited layer-by-layer using magnetron sputtering V. I. Popovych A. I. Yevtushenko O. S. Lytvyn V. R. Romaniuk V. M. Tkach V. A. Baturyn Ye. Karpenko M. V. Dranchuk L. O. Klochkov M. H. Dusheiko V. A. Karpyna H. V. Lashkarov 0372-400X 2016 en Ukrainian Journal of Physics http://jnas.nbuv.gov.ua/article/UJRN-0000732262 Article |
| institution |
Library portal of National Academy of Sciences of Ukraine | LibNAS |
| collection |
Open-Science |
| language |
English |
| series |
Ukrainian Journal of Physics |
| spellingShingle |
Ukrainian Journal of Physics V. I. Popovych A. I. Yevtushenko O. S. Lytvyn V. R. Romaniuk V. M. Tkach V. A. Baturyn Ye. Karpenko M. V. Dranchuk L. O. Klochkov M. H. Dusheiko V. A. Karpyna H. V. Lashkarov Effect of argon deposition pressure on the properties of aluminum-doped ZnO films deposited layer-by-layer using magnetron sputtering |
| format |
Article |
| author |
V. I. Popovych A. I. Yevtushenko O. S. Lytvyn V. R. Romaniuk V. M. Tkach V. A. Baturyn Ye. Karpenko M. V. Dranchuk L. O. Klochkov M. H. Dusheiko V. A. Karpyna H. V. Lashkarov |
| author_facet |
V. I. Popovych A. I. Yevtushenko O. S. Lytvyn V. R. Romaniuk V. M. Tkach V. A. Baturyn Ye. Karpenko M. V. Dranchuk L. O. Klochkov M. H. Dusheiko V. A. Karpyna H. V. Lashkarov |
| author_sort |
V. I. Popovych |
| title |
Effect of argon deposition pressure on the properties of aluminum-doped ZnO films deposited layer-by-layer using magnetron sputtering |
| title_short |
Effect of argon deposition pressure on the properties of aluminum-doped ZnO films deposited layer-by-layer using magnetron sputtering |
| title_full |
Effect of argon deposition pressure on the properties of aluminum-doped ZnO films deposited layer-by-layer using magnetron sputtering |
| title_fullStr |
Effect of argon deposition pressure on the properties of aluminum-doped ZnO films deposited layer-by-layer using magnetron sputtering |
| title_full_unstemmed |
Effect of argon deposition pressure on the properties of aluminum-doped ZnO films deposited layer-by-layer using magnetron sputtering |
| title_sort |
effect of argon deposition pressure on the properties of aluminum-doped zno films deposited layer-by-layer using magnetron sputtering |
| publishDate |
2016 |
| url |
http://jnas.nbuv.gov.ua/article/UJRN-0000732262 |
| work_keys_str_mv |
AT vipopovych effectofargondepositionpressureonthepropertiesofaluminumdopedznofilmsdepositedlayerbylayerusingmagnetronsputtering AT aiyevtushenko effectofargondepositionpressureonthepropertiesofaluminumdopedznofilmsdepositedlayerbylayerusingmagnetronsputtering AT oslytvyn effectofargondepositionpressureonthepropertiesofaluminumdopedznofilmsdepositedlayerbylayerusingmagnetronsputtering AT vrromaniuk effectofargondepositionpressureonthepropertiesofaluminumdopedznofilmsdepositedlayerbylayerusingmagnetronsputtering AT vmtkach effectofargondepositionpressureonthepropertiesofaluminumdopedznofilmsdepositedlayerbylayerusingmagnetronsputtering AT vabaturyn effectofargondepositionpressureonthepropertiesofaluminumdopedznofilmsdepositedlayerbylayerusingmagnetronsputtering AT yekarpenko effectofargondepositionpressureonthepropertiesofaluminumdopedznofilmsdepositedlayerbylayerusingmagnetronsputtering AT mvdranchuk effectofargondepositionpressureonthepropertiesofaluminumdopedznofilmsdepositedlayerbylayerusingmagnetronsputtering AT loklochkov effectofargondepositionpressureonthepropertiesofaluminumdopedznofilmsdepositedlayerbylayerusingmagnetronsputtering AT mhdusheiko effectofargondepositionpressureonthepropertiesofaluminumdopedznofilmsdepositedlayerbylayerusingmagnetronsputtering AT vakarpyna effectofargondepositionpressureonthepropertiesofaluminumdopedznofilmsdepositedlayerbylayerusingmagnetronsputtering AT hvlashkarov effectofargondepositionpressureonthepropertiesofaluminumdopedznofilmsdepositedlayerbylayerusingmagnetronsputtering |
| first_indexed |
2024-03-30T10:17:38Z |
| last_indexed |
2024-03-30T10:17:38Z |
| _version_ |
1796882750780735488 |