Effect of argon deposition pressure on the properties of aluminum-doped ZnO films deposited layer-by-layer using magnetron sputtering
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| Date: | 2016 |
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| Main Authors: | , , , , , , , , , , , |
| Format: | Article |
| Language: | English |
| Published: |
2016
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| Series: | Ukrainian Journal of Physics |
| Online Access: | http://jnas.nbuv.gov.ua/article/UJRN-0000732262 |
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| Journal Title: | Library portal of National Academy of Sciences of Ukraine | LibNAS |