Cover Image

Effect of argon deposition pressure on the properties of aluminum-doped ZnO films deposited layer-by-layer using magnetron sputtering

Saved in:

Bibliographic Details
Date:	2016
Main Authors:	V. I. Popovych, A. I. Yevtushenko, O. S. Lytvyn, V. R. Romaniuk, V. M. Tkach, V. A. Baturyn, Ye. Karpenko, M. V. Dranchuk, L. O. Klochkov, M. H. Dusheiko, V. A. Karpyna, H. V. Lashkarov
Format:	Article
Language:	English
Published:	2016
Series:	Ukrainian Journal of Physics
Online Access:	http://jnas.nbuv.gov.ua/article/UJRN-0000732262
Tags:	Add Tag No Tags, Be the first to tag this record!
Journal Title:	Library portal of National Academy of Sciences of Ukraine \| LibNAS

Institution

Library portal of National Academy of Sciences of Ukraine | LibNAS

Similar Items

Effect of argon deposition pressure on the properties of aluminum-doped ZnO films deposited layer-by-layer using magnetron sputtering
by: V. I. Popovych, et al.
Published: (2016)

ZnO:Al wide zone “windows” deposited by magnetron sputtering on unheated substrate
by: Boyko, B.Т., et al.
Published: (2000)

Deposition of the stoichiometric coatings by reactive magnetron sputtering
by: A. Sagalovych, et al.
Published: (2012)

Deposition of the stoichiometric coatings by reactive magnetron sputtering
by: Sagalovych, A., et al.
Published: (2012)

Plasma assisted deposition of TaB₂ coatings by magnetron sputtering system
by: Yakovin, S., et al.
Published: (2017)

Effect of electron irradiation on transparent conductive films ZnO:Al deposited at different power sputtering
by: D. V. Myroniuk, et al.
Published: (2015)

Effect of electron irradiation on transparent conductive films ZnO:Al deposited at different sputtering power
by: Myroniuk, D.V., et al.
Published: (2015)

Structure of tantalum diboride thin films deposited by RF-magnetron sputtering
by: Konovalov, V.A., et al.
Published: (2008)

Structure and Photocatalytic Properties of Titania Nanofilms Deposited by Reactive Magnetron Sputtering
by: A. A. Goncharov, et al.
Published: (2014)

Structural and optical studies of Cu₆PSe₅I-based thin film deposited by magnetron sputtering
by: Studenyak, I.P., et al.
Published: (2017)

Structure and properties of the coatings of the Al–B–Si–C system deposited by magnetron sputtering
by: A. O. Kozak, et al.
Published: (2020)

ZnO thin films obtained by atomic layer deposition as a material for photovoltaics
by: T. V. Semikina, et al.
Published: (2016)

ZnO thin films obtained by atomic layer deposition as a material for photovoltaics
by: T. V. Semikina, et al.
Published: (2016)

Infrared heaters with thin-film conductive layers were synthesized on the glass by the magnetron sputtering
by: Lytvynenko, V.V., et al.
Published: (2017)

Electrical and optical parameters of Cu₆PS₅I-based thin films deposited using magnetron sputtering
by: Studenyak, I.P., et al.
Published: (2016)

Structural and optical studies of Cu6PSe5I-based thin film deposited by magnetron sputtering
by: I. P. Studenyak, et al.
Published: (2017)

Features of coatings deposition in combined stationary-pulsed operation mode of the magnetron sputtering system
by: Chunadra, А.G., et al.
Published: (2017)

IR Spectroscopic Study of Thin ZnO Films Grown Using the Atomic Layer Deposition Method
by: E. F. Venger, et al.
Published: (2016)

Influence of magnetic field configuration and strength on plasma parameters and efficiency of coatings deposition in magnetron sputtering system
by: Chunadra, А.G., et al.
Published: (2022)

Diode structures and electrical properties of ZnO films grown using the atomic layer deposition method
by: T. V. Semikina
Published: (2016)

IR spectroscopic study of thin ZnO films grown using the atomic layer deposition method
by: Ye. F. Venher, et al.
Published: (2016)

Characterisation of Mo–V–N Coatings Deposited on XC100 Substrate by Sputtering Cathodic Magnetron
by: Chermime, Brahim, et al.
Published: (2017)

Ion-plasma system for reactive magnetron deposition
by: S. D. Yakovin, et al.
Published: (2014)

Electrical and optical parameters of Cu6PS5I-based thin films deposited using magnetron sputtering
by: I. P. Studenyak, et al.
Published: (2016)

Characterization of Ti–B–C–N films deposited by dc magnetron sputtering of bicomponent Ti/B₄C target
by: Onoprienko, A.A., et al.
Published: (2015)

The investigation of the optical spectra in process of magnetron deposition
by: Demchishin, A.V., et al.
Published: (2008)

Chemical composition and light emission properties of Si-rich-SiOx layers prepared by magnetron sputtering
by: Khomenkova, L., et al.
Published: (2007)

Characterization of Ti–B–C–N films deposited by dc magnetron sputtering of bicomponent Ti/B4C target
by: A. A. Onoprienko, et al.
Published: (2015)

Influence of nitrogen on the microstructure, hardness and tribological properties of Cr–Ni–B–C–N films deposited by DC magnetron sputtering
by: O. O. Onopriienko, et al.
Published: (2020)

Deposition and characterization of thin Si–B–C–N films by dc reactive magnetron sputtering of composed Si/B₄C target
by: Onoprienko, A.A., et al.
Published: (2019)

The influence of phase composition of deposited layers of hydrocylinder rods on their local corrosion
by: A. A. Holiakevych, et al.
Published: (2014)

Seismic response of a layered soil deposit with inclusions
by: O. V. Kendzera, et al.
Published: (2021)

Seismic response of a layered soil deposit with inclusions
by: Kendzera, O.V., et al.
Published: (2021)

Optical and structure characteristics of vacuum-deposited layers
by: Drobyshev, A.S.
Published: (1996)

Deposition and characterization of thin Si–B–C–N films by dc reactive magnetron sputtering of composed Si/B4C target
by: A. A. Onoprienko, et al.
Published: (2019)

Formation of antibacterial coatings on chitosan matrices by magnetron sputtering
by: O. V. Kalinkevich, et al.
Published: (2017)

Gas magnetron deposition of structured TiO₂ nanofilms
by: Dobrovolskiy, A.M., et al.
Published: (2013)

Structure and magnetic state of films deposited by laser sputtering of nickel
by: Bagmut, A.G., et al.
Published: (2009)

Deposition of carbon nanotubes&#039; layer on surface of reactor alloys
by: S. S. Chuprov, et al.
Published: (2012)

Influence of X-ray irradiation on the optical absorption edge and refractive index dispersion in Cu₆PS₅I-based thin films deposited using magnetron sputtering
by: Studenyak, I.P., et al.
Published: (2017)