IR Spectroscopic Study of Thin ZnO Films Grown Using the Atomic Layer Deposition Method
Збережено в:
| Дата: | 2016 |
|---|---|
| Автори: | , , , |
| Формат: | Стаття |
| Мова: | Англійська |
| Опубліковано: |
2016
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| Назва видання: | Ukrainian journal of physics |
| Онлайн доступ: | http://jnas.nbuv.gov.ua/article/UJRN-0001396043 |
| Теги: |
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| Назва журналу: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
Репозитарії
Library portal of National Academy of Sciences of Ukraine | LibNAS| _version_ | 1859519876684578816 |
|---|---|
| author | E. F. Venger Yu. Melnichuk A. V. Melnichuk T. V. Semikina |
| author_facet | E. F. Venger Yu. Melnichuk A. V. Melnichuk T. V. Semikina |
| author_sort | E. F. Venger |
| collection | Open-Science |
| first_indexed | 2025-07-18T00:45:52Z |
| format | Article |
| id | open-sciencenbuvgovua-57186 |
| institution | Library portal of National Academy of Sciences of Ukraine | LibNAS |
| language | English |
| last_indexed | 2025-07-18T00:45:52Z |
| publishDate | 2016 |
| record_format | dspace |
| series | Ukrainian journal of physics |
| spelling | open-sciencenbuvgovua-571862024-02-29T13:27:34Z IR Spectroscopic Study of Thin ZnO Films Grown Using the Atomic Layer Deposition Method E. F. Venger Yu. Melnichuk A. V. Melnichuk T. V. Semikina 2071-0186 2016 en Ukrainian journal of physics http://jnas.nbuv.gov.ua/article/UJRN-0001396043 Article |
| spellingShingle | Ukrainian journal of physics E. F. Venger Yu. Melnichuk A. V. Melnichuk T. V. Semikina IR Spectroscopic Study of Thin ZnO Films Grown Using the Atomic Layer Deposition Method |
| title | IR Spectroscopic Study of Thin ZnO Films Grown Using the Atomic Layer Deposition Method |
| title_full | IR Spectroscopic Study of Thin ZnO Films Grown Using the Atomic Layer Deposition Method |
| title_fullStr | IR Spectroscopic Study of Thin ZnO Films Grown Using the Atomic Layer Deposition Method |
| title_full_unstemmed | IR Spectroscopic Study of Thin ZnO Films Grown Using the Atomic Layer Deposition Method |
| title_short | IR Spectroscopic Study of Thin ZnO Films Grown Using the Atomic Layer Deposition Method |
| title_sort | ir spectroscopic study of thin zno films grown using the atomic layer deposition method |
| url | http://jnas.nbuv.gov.ua/article/UJRN-0001396043 |
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