IR Spectroscopic Study of Thin ZnO Films Grown Using the Atomic Layer Deposition Method
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| Datum: | 2016 |
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| Hauptverfasser: | , , , |
| Format: | Artikel |
| Sprache: | English |
| Veröffentlicht: |
2016
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| Schriftenreihe: | Ukrainian journal of physics |
| Online Zugang: | http://jnas.nbuv.gov.ua/article/UJRN-0001396043 |
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| Назва журналу: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
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open-sciencenbuvgovua-571862024-02-29T13:27:34Z IR Spectroscopic Study of Thin ZnO Films Grown Using the Atomic Layer Deposition Method E. F. Venger Yu. Melnichuk A. V. Melnichuk T. V. Semikina 2071-0186 2016 en Ukrainian journal of physics http://jnas.nbuv.gov.ua/article/UJRN-0001396043 Article |
| institution |
Library portal of National Academy of Sciences of Ukraine | LibNAS |
| collection |
Open-Science |
| language |
English |
| series |
Ukrainian journal of physics |
| spellingShingle |
Ukrainian journal of physics E. F. Venger Yu. Melnichuk A. V. Melnichuk T. V. Semikina IR Spectroscopic Study of Thin ZnO Films Grown Using the Atomic Layer Deposition Method |
| format |
Article |
| author |
E. F. Venger Yu. Melnichuk A. V. Melnichuk T. V. Semikina |
| author_facet |
E. F. Venger Yu. Melnichuk A. V. Melnichuk T. V. Semikina |
| author_sort |
E. F. Venger |
| title |
IR Spectroscopic Study of Thin ZnO Films Grown Using the Atomic Layer Deposition Method |
| title_short |
IR Spectroscopic Study of Thin ZnO Films Grown Using the Atomic Layer Deposition Method |
| title_full |
IR Spectroscopic Study of Thin ZnO Films Grown Using the Atomic Layer Deposition Method |
| title_fullStr |
IR Spectroscopic Study of Thin ZnO Films Grown Using the Atomic Layer Deposition Method |
| title_full_unstemmed |
IR Spectroscopic Study of Thin ZnO Films Grown Using the Atomic Layer Deposition Method |
| title_sort |
ir spectroscopic study of thin zno films grown using the atomic layer deposition method |
| publishDate |
2016 |
| url |
http://jnas.nbuv.gov.ua/article/UJRN-0001396043 |
| work_keys_str_mv |
AT efvenger irspectroscopicstudyofthinznofilmsgrownusingtheatomiclayerdepositionmethod AT yumelnichuk irspectroscopicstudyofthinznofilmsgrownusingtheatomiclayerdepositionmethod AT avmelnichuk irspectroscopicstudyofthinznofilmsgrownusingtheatomiclayerdepositionmethod AT tvsemikina irspectroscopicstudyofthinznofilmsgrownusingtheatomiclayerdepositionmethod |
| first_indexed |
2025-07-18T00:45:52Z |
| last_indexed |
2025-07-18T00:45:52Z |
| _version_ |
1850417234674974720 |