Turtsevich, A. S., & Nalivaiko, O. Y. (2015). Deposition of borophosphosilicate glass films using the TEOS–dimethylphosphite–trimethylborate system.
Chicago Style (17th ed.) CitationTurtsevich, A. S., and O. Y. Nalivaiko. Deposition of Borophosphosilicate Glass Films Using the TEOS–dimethylphosphite–trimethylborate System. 2015.
MLA (8th ed.) CitationTurtsevich, A. S., and O. Y. Nalivaiko. Deposition of Borophosphosilicate Glass Films Using the TEOS–dimethylphosphite–trimethylborate System. 2015.
Warning: These citations may not always be 100% accurate.