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Deposition of borophosphosilicate glass films using the TEOS–dimethylphosphite–trimethylborate system
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| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
2015
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| Series: | Technology and design in electronic equipment |
| Online Access: | http://jnas.nbuv.gov.ua/article/UJRN-0000405316 |
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open-sciencenbuvgovua-583202024-04-16T12:38:11Z Deposition of borophosphosilicate glass films using the TEOS–dimethylphosphite–trimethylborate system A. S. Turtsevich O. Y. Nalivaiko 2225-5818 2015 en Technology and design in electronic equipment http://jnas.nbuv.gov.ua/article/UJRN-0000405316 Article |
| institution |
Library portal of National Academy of Sciences of Ukraine | LibNAS |
| collection |
Open-Science |
| language |
English |
| series |
Technology and design in electronic equipment |
| spellingShingle |
Technology and design in electronic equipment A. S. Turtsevich O. Y. Nalivaiko Deposition of borophosphosilicate glass films using the TEOS–dimethylphosphite–trimethylborate system |
| format |
Article |
| author |
A. S. Turtsevich O. Y. Nalivaiko |
| author_facet |
A. S. Turtsevich O. Y. Nalivaiko |
| author_sort |
A. S. Turtsevich |
| title |
Deposition of borophosphosilicate glass films using the TEOS–dimethylphosphite–trimethylborate system |
| title_short |
Deposition of borophosphosilicate glass films using the TEOS–dimethylphosphite–trimethylborate system |
| title_full |
Deposition of borophosphosilicate glass films using the TEOS–dimethylphosphite–trimethylborate system |
| title_fullStr |
Deposition of borophosphosilicate glass films using the TEOS–dimethylphosphite–trimethylborate system |
| title_full_unstemmed |
Deposition of borophosphosilicate glass films using the TEOS–dimethylphosphite–trimethylborate system |
| title_sort |
deposition of borophosphosilicate glass films using the teos–dimethylphosphite–trimethylborate system |
| publishDate |
2015 |
| url |
http://jnas.nbuv.gov.ua/article/UJRN-0000405316 |
| work_keys_str_mv |
AT asturtsevich depositionofborophosphosilicateglassfilmsusingtheteosdimethylphosphitetrimethylboratesystem AT oynalivaiko depositionofborophosphosilicateglassfilmsusingtheteosdimethylphosphitetrimethylboratesystem |
| first_indexed |
2024-04-17T04:16:04Z |
| last_indexed |
2024-04-17T04:16:04Z |
| _version_ |
1796883359891193856 |