Deposition of borophosphosilicate glass films using the TEOS–dimethylphosphite–trimethylborate system
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| Date: | 2015 |
|---|---|
| Main Authors: | , |
| Format: | Article |
| Language: | English |
| Published: |
2015
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| Series: | Technology and design in electronic equipment |
| Online Access: | http://jnas.nbuv.gov.ua/article/UJRN-0000405316 |
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| Journal Title: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
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Library portal of National Academy of Sciences of Ukraine | LibNAS| _version_ | 1859520568136564736 |
|---|---|
| author | A. S. Turtsevich O. Y. Nalivaiko |
| author_facet | A. S. Turtsevich O. Y. Nalivaiko |
| author_sort | A. S. Turtsevich |
| collection | Open-Science |
| first_indexed | 2025-07-18T01:11:17Z |
| format | Article |
| id | open-sciencenbuvgovua-58320 |
| institution | Library portal of National Academy of Sciences of Ukraine | LibNAS |
| language | English |
| last_indexed | 2025-07-18T01:11:17Z |
| publishDate | 2015 |
| record_format | dspace |
| series | Technology and design in electronic equipment |
| spelling | open-sciencenbuvgovua-583202024-04-16T12:38:11Z Deposition of borophosphosilicate glass films using the TEOS–dimethylphosphite–trimethylborate system A. S. Turtsevich O. Y. Nalivaiko 2225-5818 2015 en Technology and design in electronic equipment http://jnas.nbuv.gov.ua/article/UJRN-0000405316 Article |
| spellingShingle | Technology and design in electronic equipment A. S. Turtsevich O. Y. Nalivaiko Deposition of borophosphosilicate glass films using the TEOS–dimethylphosphite–trimethylborate system |
| title | Deposition of borophosphosilicate glass films using the TEOS–dimethylphosphite–trimethylborate system |
| title_full | Deposition of borophosphosilicate glass films using the TEOS–dimethylphosphite–trimethylborate system |
| title_fullStr | Deposition of borophosphosilicate glass films using the TEOS–dimethylphosphite–trimethylborate system |
| title_full_unstemmed | Deposition of borophosphosilicate glass films using the TEOS–dimethylphosphite–trimethylborate system |
| title_short | Deposition of borophosphosilicate glass films using the TEOS–dimethylphosphite–trimethylborate system |
| title_sort | deposition of borophosphosilicate glass films using the teos–dimethylphosphite–trimethylborate system |
| url | http://jnas.nbuv.gov.ua/article/UJRN-0000405316 |
| work_keys_str_mv | AT asturtsevich depositionofborophosphosilicateglassfilmsusingtheteosdimethylphosphitetrimethylboratesystem AT oynalivaiko depositionofborophosphosilicateglassfilmsusingtheteosdimethylphosphitetrimethylboratesystem |