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Deposition of borophosphosilicate glass films using the TEOS–dimethylphosphite–trimethylborate system

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Bibliographic Details
Date:	2015
Main Authors:	A. S. Turtsevich, O. Y. Nalivaiko
Format:	Article
Language:	English
Published:	2015
Series:	Technology and design in electronic equipment
Online Access:	http://jnas.nbuv.gov.ua/article/UJRN-0000405316
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Journal Title:	Library portal of National Academy of Sciences of Ukraine \| LibNAS

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Library portal of National Academy of Sciences of Ukraine | LibNAS

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