Influence of conditions of deposition and annealing on a nanohardness of amorphous Si–C–N films
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| Datum: | 2015 |
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| Format: | Artikel |
| Sprache: | English |
| Veröffentlicht: |
2015
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| Schriftenreihe: | Nanosystems, nanomaterials, nanotechnologies |
| Online Zugang: | http://jnas.nbuv.gov.ua/article/UJRN-0000454323 |
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| Назва журналу: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
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open-sciencenbuvgovua-601132024-04-16T12:48:00Z Influence of conditions of deposition and annealing on a nanohardness of amorphous Si–C–N films O. K. Porada 1816-5230 2015 en Nanosystems, nanomaterials, nanotechnologies http://jnas.nbuv.gov.ua/article/UJRN-0000454323 Article |
| institution |
Library portal of National Academy of Sciences of Ukraine | LibNAS |
| collection |
Open-Science |
| language |
English |
| series |
Nanosystems, nanomaterials, nanotechnologies |
| spellingShingle |
Nanosystems, nanomaterials, nanotechnologies O. K. Porada Influence of conditions of deposition and annealing on a nanohardness of amorphous Si–C–N films |
| format |
Article |
| author |
O. K. Porada |
| author_facet |
O. K. Porada |
| author_sort |
O. K. Porada |
| title |
Influence of conditions of deposition and annealing on a nanohardness of amorphous Si–C–N films |
| title_short |
Influence of conditions of deposition and annealing on a nanohardness of amorphous Si–C–N films |
| title_full |
Influence of conditions of deposition and annealing on a nanohardness of amorphous Si–C–N films |
| title_fullStr |
Influence of conditions of deposition and annealing on a nanohardness of amorphous Si–C–N films |
| title_full_unstemmed |
Influence of conditions of deposition and annealing on a nanohardness of amorphous Si–C–N films |
| title_sort |
influence of conditions of deposition and annealing on a nanohardness of amorphous si–c–n films |
| publishDate |
2015 |
| url |
http://jnas.nbuv.gov.ua/article/UJRN-0000454323 |
| work_keys_str_mv |
AT okporada influenceofconditionsofdepositionandannealingonananohardnessofamorphoussicnfilms |
| first_indexed |
2025-07-18T01:53:43Z |
| last_indexed |
2025-07-18T01:53:43Z |
| _version_ |
1850417547650793472 |