Characterization of Ti–B–C–N films deposited by dc magnetron sputtering of bicomponent Ti/B4C target
Збережено в:
| Дата: | 2015 |
|---|---|
| Автори: | , , , , |
| Формат: | Стаття |
| Мова: | English |
| Опубліковано: |
2015
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| Назва видання: | Superhard Materials |
| Онлайн доступ: | http://jnas.nbuv.gov.ua/article/UJRN-0000694055 |
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| Назва журналу: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
Репозитарії
Library portal of National Academy of Sciences of Ukraine | LibNAS| id |
open-sciencenbuvgovua-65272 |
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| record_format |
dspace |
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open-sciencenbuvgovua-652722024-04-16T13:16:54Z Characterization of Ti–B–C–N films deposited by dc magnetron sputtering of bicomponent Ti/B4C target A. A. Onoprienko V. I. Ivashchenko I. I. Timofeeva A. K. Sinelnitchenko O. A. Butenko 0203-3119 2015 en Superhard Materials http://jnas.nbuv.gov.ua/article/UJRN-0000694055 Article |
| institution |
Library portal of National Academy of Sciences of Ukraine | LibNAS |
| collection |
Open-Science |
| language |
English |
| series |
Superhard Materials |
| spellingShingle |
Superhard Materials A. A. Onoprienko V. I. Ivashchenko I. I. Timofeeva A. K. Sinelnitchenko O. A. Butenko Characterization of Ti–B–C–N films deposited by dc magnetron sputtering of bicomponent Ti/B4C target |
| format |
Article |
| author |
A. A. Onoprienko V. I. Ivashchenko I. I. Timofeeva A. K. Sinelnitchenko O. A. Butenko |
| author_facet |
A. A. Onoprienko V. I. Ivashchenko I. I. Timofeeva A. K. Sinelnitchenko O. A. Butenko |
| author_sort |
A. A. Onoprienko |
| title |
Characterization of Ti–B–C–N films deposited by dc magnetron sputtering of bicomponent Ti/B4C target |
| title_short |
Characterization of Ti–B–C–N films deposited by dc magnetron sputtering of bicomponent Ti/B4C target |
| title_full |
Characterization of Ti–B–C–N films deposited by dc magnetron sputtering of bicomponent Ti/B4C target |
| title_fullStr |
Characterization of Ti–B–C–N films deposited by dc magnetron sputtering of bicomponent Ti/B4C target |
| title_full_unstemmed |
Characterization of Ti–B–C–N films deposited by dc magnetron sputtering of bicomponent Ti/B4C target |
| title_sort |
characterization of ti–b–c–n films deposited by dc magnetron sputtering of bicomponent ti/b4c target |
| publishDate |
2015 |
| url |
http://jnas.nbuv.gov.ua/article/UJRN-0000694055 |
| work_keys_str_mv |
AT aaonoprienko characterizationoftibcnfilmsdepositedbydcmagnetronsputteringofbicomponenttib4ctarget AT viivashchenko characterizationoftibcnfilmsdepositedbydcmagnetronsputteringofbicomponenttib4ctarget AT iitimofeeva characterizationoftibcnfilmsdepositedbydcmagnetronsputteringofbicomponenttib4ctarget AT aksinelnitchenko characterizationoftibcnfilmsdepositedbydcmagnetronsputteringofbicomponenttib4ctarget AT oabutenko characterizationoftibcnfilmsdepositedbydcmagnetronsputteringofbicomponenttib4ctarget |
| first_indexed |
2024-04-17T04:44:13Z |
| last_indexed |
2024-04-17T04:44:13Z |
| _version_ |
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