Characterization of Ti–B–C–N films deposited by dc magnetron sputtering of bicomponent Ti/B4C target
Збережено в:
| Дата: | 2015 |
|---|---|
| Автори: | , , , , |
| Формат: | Стаття |
| Мова: | Англійська |
| Опубліковано: |
2015
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| Назва видання: | Superhard Materials |
| Онлайн доступ: | http://jnas.nbuv.gov.ua/article/UJRN-0000694055 |
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| Назва журналу: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
Репозитарії
Library portal of National Academy of Sciences of Ukraine | LibNAS| _version_ | 1859525812325187584 |
|---|---|
| author | A. A. Onoprienko V. I. Ivashchenko I. I. Timofeeva A. K. Sinelnitchenko O. A. Butenko |
| author_facet | A. A. Onoprienko V. I. Ivashchenko I. I. Timofeeva A. K. Sinelnitchenko O. A. Butenko |
| author_sort | A. A. Onoprienko |
| collection | Open-Science |
| first_indexed | 2025-07-22T04:56:37Z |
| format | Article |
| id | open-sciencenbuvgovua-65272 |
| institution | Library portal of National Academy of Sciences of Ukraine | LibNAS |
| language | English |
| last_indexed | 2025-07-22T04:56:37Z |
| publishDate | 2015 |
| record_format | dspace |
| series | Superhard Materials |
| spelling | open-sciencenbuvgovua-652722024-04-16T13:16:54Z Characterization of Ti–B–C–N films deposited by dc magnetron sputtering of bicomponent Ti/B4C target A. A. Onoprienko V. I. Ivashchenko I. I. Timofeeva A. K. Sinelnitchenko O. A. Butenko 0203-3119 2015 en Superhard Materials http://jnas.nbuv.gov.ua/article/UJRN-0000694055 Article |
| spellingShingle | Superhard Materials A. A. Onoprienko V. I. Ivashchenko I. I. Timofeeva A. K. Sinelnitchenko O. A. Butenko Characterization of Ti–B–C–N films deposited by dc magnetron sputtering of bicomponent Ti/B4C target |
| title | Characterization of Ti–B–C–N films deposited by dc magnetron sputtering of bicomponent Ti/B4C target |
| title_full | Characterization of Ti–B–C–N films deposited by dc magnetron sputtering of bicomponent Ti/B4C target |
| title_fullStr | Characterization of Ti–B–C–N films deposited by dc magnetron sputtering of bicomponent Ti/B4C target |
| title_full_unstemmed | Characterization of Ti–B–C–N films deposited by dc magnetron sputtering of bicomponent Ti/B4C target |
| title_short | Characterization of Ti–B–C–N films deposited by dc magnetron sputtering of bicomponent Ti/B4C target |
| title_sort | characterization of ti–b–c–n films deposited by dc magnetron sputtering of bicomponent ti/b4c target |
| url | http://jnas.nbuv.gov.ua/article/UJRN-0000694055 |
| work_keys_str_mv | AT aaonoprienko characterizationoftibcnfilmsdepositedbydcmagnetronsputteringofbicomponenttib4ctarget AT viivashchenko characterizationoftibcnfilmsdepositedbydcmagnetronsputteringofbicomponenttib4ctarget AT iitimofeeva characterizationoftibcnfilmsdepositedbydcmagnetronsputteringofbicomponenttib4ctarget AT aksinelnitchenko characterizationoftibcnfilmsdepositedbydcmagnetronsputteringofbicomponenttib4ctarget AT oabutenko characterizationoftibcnfilmsdepositedbydcmagnetronsputteringofbicomponenttib4ctarget |