Characterization of Ti–B–C–N films deposited by dc magnetron sputtering of bicomponent Ti/B4C target

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Datum:2015
Hauptverfasser: A. A. Onoprienko, V. I. Ivashchenko, I. I. Timofeeva, A. K. Sinelnitchenko, O. A. Butenko
Format: Artikel
Sprache:English
Veröffentlicht: 2015
Schriftenreihe:Superhard Materials
Online Zugang:http://jnas.nbuv.gov.ua/article/UJRN-0000694055
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Назва журналу:Library portal of National Academy of Sciences of Ukraine | LibNAS

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Library portal of National Academy of Sciences of Ukraine | LibNAS
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spelling open-sciencenbuvgovua-652722024-04-16T13:16:54Z Characterization of Ti–B–C–N films deposited by dc magnetron sputtering of bicomponent Ti/B4C target A. A. Onoprienko V. I. Ivashchenko I. I. Timofeeva A. K. Sinelnitchenko O. A. Butenko 0203-3119 2015 en Superhard Materials http://jnas.nbuv.gov.ua/article/UJRN-0000694055 Article
institution Library portal of National Academy of Sciences of Ukraine | LibNAS
collection Open-Science
language English
series Superhard Materials
spellingShingle Superhard Materials
A. A. Onoprienko
V. I. Ivashchenko
I. I. Timofeeva
A. K. Sinelnitchenko
O. A. Butenko
Characterization of Ti–B–C–N films deposited by dc magnetron sputtering of bicomponent Ti/B4C target
format Article
author A. A. Onoprienko
V. I. Ivashchenko
I. I. Timofeeva
A. K. Sinelnitchenko
O. A. Butenko
author_facet A. A. Onoprienko
V. I. Ivashchenko
I. I. Timofeeva
A. K. Sinelnitchenko
O. A. Butenko
author_sort A. A. Onoprienko
title Characterization of Ti–B–C–N films deposited by dc magnetron sputtering of bicomponent Ti/B4C target
title_short Characterization of Ti–B–C–N films deposited by dc magnetron sputtering of bicomponent Ti/B4C target
title_full Characterization of Ti–B–C–N films deposited by dc magnetron sputtering of bicomponent Ti/B4C target
title_fullStr Characterization of Ti–B–C–N films deposited by dc magnetron sputtering of bicomponent Ti/B4C target
title_full_unstemmed Characterization of Ti–B–C–N films deposited by dc magnetron sputtering of bicomponent Ti/B4C target
title_sort characterization of ti–b–c–n films deposited by dc magnetron sputtering of bicomponent ti/b4c target
publishDate 2015
url http://jnas.nbuv.gov.ua/article/UJRN-0000694055
work_keys_str_mv AT aaonoprienko characterizationoftibcnfilmsdepositedbydcmagnetronsputteringofbicomponenttib4ctarget
AT viivashchenko characterizationoftibcnfilmsdepositedbydcmagnetronsputteringofbicomponenttib4ctarget
AT iitimofeeva characterizationoftibcnfilmsdepositedbydcmagnetronsputteringofbicomponenttib4ctarget
AT aksinelnitchenko characterizationoftibcnfilmsdepositedbydcmagnetronsputteringofbicomponenttib4ctarget
AT oabutenko characterizationoftibcnfilmsdepositedbydcmagnetronsputteringofbicomponenttib4ctarget
first_indexed 2025-07-22T04:56:37Z
last_indexed 2025-07-22T04:56:37Z
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