APA (7th ed.) Citation

Antoniuk, V. S., Bilokin, S. O., Bondarenko, M. O., Bondarenko, Y. Y., & Kovalenko, Y. I. (2015). Formation of wear-resistant coatings on silicon probes for atomic force microscopy by thermal vacuum evaporation.

Chicago Style (17th ed.) Citation

Antoniuk, V. S., S. O. Bilokin, M. O. Bondarenko, Yu. Yu Bondarenko, and Yu. I. Kovalenko. Formation of Wear-resistant Coatings on Silicon Probes for Atomic Force Microscopy by Thermal Vacuum Evaporation. 2015.

MLA (8th ed.) Citation

Antoniuk, V. S., et al. Formation of Wear-resistant Coatings on Silicon Probes for Atomic Force Microscopy by Thermal Vacuum Evaporation. 2015.

Warning: These citations may not always be 100% accurate.