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Formation of wear-resistant coatings on silicon probes for atomic force microscopy by thermal vacuum evaporation

Formation of wear-resistant coatings on silicon probes for atomic force microscopy by thermal vacuum evaporation

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Bibliographic Details
Main Authors: V. S. Antoniuk, S. O. Bilokin, M. O. Bondarenko, Yu. Yu. Bondarenko, Yu. I. Kovalenko
Format: Article
Language:English
Published: 2015
Series:Superhard Materials
Online Access:http://jnas.nbuv.gov.ua/article/UJRN-0000694089
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