Formation of wear-resistant coatings on silicon probes for atomic force microscopy by thermal vacuum evaporation
Збережено в:
| Дата: | 2015 |
|---|---|
| Автори: | , , , , |
| Формат: | Стаття |
| Мова: | English |
| Опубліковано: |
2015
|
| Назва видання: | Superhard Materials |
| Онлайн доступ: | http://jnas.nbuv.gov.ua/article/UJRN-0000694089 |
| Теги: |
Додати тег
Немає тегів, Будьте першим, хто поставить тег для цього запису!
|
| Назва журналу: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
Репозитарії
Library portal of National Academy of Sciences of Ukraine | LibNAS| id |
open-sciencenbuvgovua-65284 |
|---|---|
| record_format |
dspace |
| spelling |
open-sciencenbuvgovua-652842024-04-16T13:17:00Z Formation of wear-resistant coatings on silicon probes for atomic force microscopy by thermal vacuum evaporation V. S. Antoniuk S. O. Bilokin M. O. Bondarenko Yu. Yu. Bondarenko Yu. I. Kovalenko 0203-3119 2015 en Superhard Materials http://jnas.nbuv.gov.ua/article/UJRN-0000694089 Article |
| institution |
Library portal of National Academy of Sciences of Ukraine | LibNAS |
| collection |
Open-Science |
| language |
English |
| series |
Superhard Materials |
| spellingShingle |
Superhard Materials V. S. Antoniuk S. O. Bilokin M. O. Bondarenko Yu. Yu. Bondarenko Yu. I. Kovalenko Formation of wear-resistant coatings on silicon probes for atomic force microscopy by thermal vacuum evaporation |
| format |
Article |
| author |
V. S. Antoniuk S. O. Bilokin M. O. Bondarenko Yu. Yu. Bondarenko Yu. I. Kovalenko |
| author_facet |
V. S. Antoniuk S. O. Bilokin M. O. Bondarenko Yu. Yu. Bondarenko Yu. I. Kovalenko |
| author_sort |
V. S. Antoniuk |
| title |
Formation of wear-resistant coatings on silicon probes for atomic force microscopy by thermal vacuum evaporation |
| title_short |
Formation of wear-resistant coatings on silicon probes for atomic force microscopy by thermal vacuum evaporation |
| title_full |
Formation of wear-resistant coatings on silicon probes for atomic force microscopy by thermal vacuum evaporation |
| title_fullStr |
Formation of wear-resistant coatings on silicon probes for atomic force microscopy by thermal vacuum evaporation |
| title_full_unstemmed |
Formation of wear-resistant coatings on silicon probes for atomic force microscopy by thermal vacuum evaporation |
| title_sort |
formation of wear-resistant coatings on silicon probes for atomic force microscopy by thermal vacuum evaporation |
| publishDate |
2015 |
| url |
http://jnas.nbuv.gov.ua/article/UJRN-0000694089 |
| work_keys_str_mv |
AT vsantoniuk formationofwearresistantcoatingsonsiliconprobesforatomicforcemicroscopybythermalvacuumevaporation AT sobilokin formationofwearresistantcoatingsonsiliconprobesforatomicforcemicroscopybythermalvacuumevaporation AT mobondarenko formationofwearresistantcoatingsonsiliconprobesforatomicforcemicroscopybythermalvacuumevaporation AT yuyubondarenko formationofwearresistantcoatingsonsiliconprobesforatomicforcemicroscopybythermalvacuumevaporation AT yuikovalenko formationofwearresistantcoatingsonsiliconprobesforatomicforcemicroscopybythermalvacuumevaporation |
| first_indexed |
2024-04-17T04:44:16Z |
| last_indexed |
2024-04-17T04:44:16Z |
| _version_ |
1796884087592452096 |