Formation of wear-resistant coatings on silicon probes for atomic force microscopy by thermal vacuum evaporation
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| Datum: | 2015 |
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| Hauptverfasser: | , , , , |
| Format: | Artikel |
| Sprache: | Englisch |
| Veröffentlicht: |
2015
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| Schriftenreihe: | Superhard Materials |
| Online Zugang: | http://jnas.nbuv.gov.ua/article/UJRN-0000694089 |
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| Назва журналу: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
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Library portal of National Academy of Sciences of Ukraine | LibNAS| _version_ | 1859525814517760000 |
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| author | V. S. Antoniuk S. O. Bilokin M. O. Bondarenko Yu. Yu. Bondarenko Yu. I. Kovalenko |
| author_facet | V. S. Antoniuk S. O. Bilokin M. O. Bondarenko Yu. Yu. Bondarenko Yu. I. Kovalenko |
| author_sort | V. S. Antoniuk |
| collection | Open-Science |
| first_indexed | 2025-07-22T04:56:43Z |
| format | Article |
| id | open-sciencenbuvgovua-65284 |
| institution | Library portal of National Academy of Sciences of Ukraine | LibNAS |
| language | English |
| last_indexed | 2025-07-22T04:56:43Z |
| publishDate | 2015 |
| record_format | dspace |
| series | Superhard Materials |
| spelling | open-sciencenbuvgovua-652842024-04-16T13:17:00Z Formation of wear-resistant coatings on silicon probes for atomic force microscopy by thermal vacuum evaporation V. S. Antoniuk S. O. Bilokin M. O. Bondarenko Yu. Yu. Bondarenko Yu. I. Kovalenko 0203-3119 2015 en Superhard Materials http://jnas.nbuv.gov.ua/article/UJRN-0000694089 Article |
| spellingShingle | Superhard Materials V. S. Antoniuk S. O. Bilokin M. O. Bondarenko Yu. Yu. Bondarenko Yu. I. Kovalenko Formation of wear-resistant coatings on silicon probes for atomic force microscopy by thermal vacuum evaporation |
| title | Formation of wear-resistant coatings on silicon probes for atomic force microscopy by thermal vacuum evaporation |
| title_full | Formation of wear-resistant coatings on silicon probes for atomic force microscopy by thermal vacuum evaporation |
| title_fullStr | Formation of wear-resistant coatings on silicon probes for atomic force microscopy by thermal vacuum evaporation |
| title_full_unstemmed | Formation of wear-resistant coatings on silicon probes for atomic force microscopy by thermal vacuum evaporation |
| title_short | Formation of wear-resistant coatings on silicon probes for atomic force microscopy by thermal vacuum evaporation |
| title_sort | formation of wear-resistant coatings on silicon probes for atomic force microscopy by thermal vacuum evaporation |
| url | http://jnas.nbuv.gov.ua/article/UJRN-0000694089 |
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