Formation of wear-resistant coatings on silicon probes for atomic force microscopy by thermal vacuum evaporation

Збережено в:
Бібліографічні деталі
Дата:2015
Автори: V. S. Antoniuk, S. O. Bilokin, M. O. Bondarenko, Yu. Yu. Bondarenko, Yu. I. Kovalenko
Формат: Стаття
Мова:Англійська
Опубліковано: 2015
Назва видання:Superhard Materials
Онлайн доступ:http://jnas.nbuv.gov.ua/article/UJRN-0000694089
Теги: Додати тег
Немає тегів, Будьте першим, хто поставить тег для цього запису!
Назва журналу:Library portal of National Academy of Sciences of Ukraine | LibNAS

Репозитарії

Library portal of National Academy of Sciences of Ukraine | LibNAS
_version_ 1859525814517760000
author V. S. Antoniuk
S. O. Bilokin
M. O. Bondarenko
Yu. Yu. Bondarenko
Yu. I. Kovalenko
author_facet V. S. Antoniuk
S. O. Bilokin
M. O. Bondarenko
Yu. Yu. Bondarenko
Yu. I. Kovalenko
author_sort V. S. Antoniuk
collection Open-Science
first_indexed 2025-07-22T04:56:43Z
format Article
id open-sciencenbuvgovua-65284
institution Library portal of National Academy of Sciences of Ukraine | LibNAS
language English
last_indexed 2025-07-22T04:56:43Z
publishDate 2015
record_format dspace
series Superhard Materials
spelling open-sciencenbuvgovua-652842024-04-16T13:17:00Z Formation of wear-resistant coatings on silicon probes for atomic force microscopy by thermal vacuum evaporation V. S. Antoniuk S. O. Bilokin M. O. Bondarenko Yu. Yu. Bondarenko Yu. I. Kovalenko 0203-3119 2015 en Superhard Materials http://jnas.nbuv.gov.ua/article/UJRN-0000694089 Article
spellingShingle Superhard Materials
V. S. Antoniuk
S. O. Bilokin
M. O. Bondarenko
Yu. Yu. Bondarenko
Yu. I. Kovalenko
Formation of wear-resistant coatings on silicon probes for atomic force microscopy by thermal vacuum evaporation
title Formation of wear-resistant coatings on silicon probes for atomic force microscopy by thermal vacuum evaporation
title_full Formation of wear-resistant coatings on silicon probes for atomic force microscopy by thermal vacuum evaporation
title_fullStr Formation of wear-resistant coatings on silicon probes for atomic force microscopy by thermal vacuum evaporation
title_full_unstemmed Formation of wear-resistant coatings on silicon probes for atomic force microscopy by thermal vacuum evaporation
title_short Formation of wear-resistant coatings on silicon probes for atomic force microscopy by thermal vacuum evaporation
title_sort formation of wear-resistant coatings on silicon probes for atomic force microscopy by thermal vacuum evaporation
url http://jnas.nbuv.gov.ua/article/UJRN-0000694089
work_keys_str_mv AT vsantoniuk formationofwearresistantcoatingsonsiliconprobesforatomicforcemicroscopybythermalvacuumevaporation
AT sobilokin formationofwearresistantcoatingsonsiliconprobesforatomicforcemicroscopybythermalvacuumevaporation
AT mobondarenko formationofwearresistantcoatingsonsiliconprobesforatomicforcemicroscopybythermalvacuumevaporation
AT yuyubondarenko formationofwearresistantcoatingsonsiliconprobesforatomicforcemicroscopybythermalvacuumevaporation
AT yuikovalenko formationofwearresistantcoatingsonsiliconprobesforatomicforcemicroscopybythermalvacuumevaporation