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Formation of wear-resistant coatings on silicon probes for atomic force microscopy by thermal vacuum evaporation

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Bibliographic Details
Date:	2015
Main Authors:	V. S. Antoniuk, S. O. Bilokin, M. O. Bondarenko, Yu. Yu. Bondarenko, Yu. I. Kovalenko
Format:	Article
Language:	English
Published:	2015
Series:	Superhard Materials
Online Access:	http://jnas.nbuv.gov.ua/article/UJRN-0000694089
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Journal Title:	Library portal of National Academy of Sciences of Ukraine \| LibNAS

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Library portal of National Academy of Sciences of Ukraine | LibNAS

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