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Formation of wear-resistant coatings on silicon probes for atomic force microscopy by thermal vacuum evaporation

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Bibliographische Detailangaben
Datum:	2015
Hauptverfasser:	V. S. Antoniuk, S. O. Bilokin, M. O. Bondarenko, Yu. Yu. Bondarenko, Yu. I. Kovalenko
Format:	Artikel
Sprache:	Englisch
Veröffentlicht:	2015
Schriftenreihe:	Superhard Materials
Online Zugang:	http://jnas.nbuv.gov.ua/article/UJRN-0000694089
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!
Назва журналу:	Library portal of National Academy of Sciences of Ukraine \| LibNAS

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Library portal of National Academy of Sciences of Ukraine | LibNAS

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