Effect of the nitrogen flow on the properties of Si–C–N amorphous thin films produced by magnetron sputtering
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| Дата: | 2015 |
|---|---|
| Автори: | , , , , , , , , |
| Формат: | Стаття |
| Мова: | Англійська |
| Опубліковано: |
2015
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| Назва видання: | Superhard Materials |
| Онлайн доступ: | http://jnas.nbuv.gov.ua/article/UJRN-0000694123 |
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| Назва журналу: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
Репозитарії
Library portal of National Academy of Sciences of Ukraine | LibNAS| _version_ | 1859525819972452352 |
|---|---|
| author | A. O. Kozak V. I. Ivashchenko O. K. Porada L. A. Ivashchenko O. K. Synelnychenko S. M. Dub O. S. Lytvyn I. I. Tymofieieva H. M. Tolmacheva |
| author_facet | A. O. Kozak V. I. Ivashchenko O. K. Porada L. A. Ivashchenko O. K. Synelnychenko S. M. Dub O. S. Lytvyn I. I. Tymofieieva H. M. Tolmacheva |
| author_sort | A. O. Kozak |
| collection | Open-Science |
| first_indexed | 2025-07-22T04:56:57Z |
| format | Article |
| id | open-sciencenbuvgovua-65308 |
| institution | Library portal of National Academy of Sciences of Ukraine | LibNAS |
| language | English |
| last_indexed | 2025-07-22T04:56:57Z |
| publishDate | 2015 |
| record_format | dspace |
| series | Superhard Materials |
| spelling | open-sciencenbuvgovua-653082024-04-16T13:17:18Z Effect of the nitrogen flow on the properties of Si–C–N amorphous thin films produced by magnetron sputtering A. O. Kozak V. I. Ivashchenko O. K. Porada L. A. Ivashchenko O. K. Synelnychenko S. M. Dub O. S. Lytvyn I. I. Tymofieieva H. M. Tolmacheva 0203-3119 2015 en Superhard Materials http://jnas.nbuv.gov.ua/article/UJRN-0000694123 Article |
| spellingShingle | Superhard Materials A. O. Kozak V. I. Ivashchenko O. K. Porada L. A. Ivashchenko O. K. Synelnychenko S. M. Dub O. S. Lytvyn I. I. Tymofieieva H. M. Tolmacheva Effect of the nitrogen flow on the properties of Si–C–N amorphous thin films produced by magnetron sputtering |
| title | Effect of the nitrogen flow on the properties of Si–C–N amorphous thin films produced by magnetron sputtering |
| title_full | Effect of the nitrogen flow on the properties of Si–C–N amorphous thin films produced by magnetron sputtering |
| title_fullStr | Effect of the nitrogen flow on the properties of Si–C–N amorphous thin films produced by magnetron sputtering |
| title_full_unstemmed | Effect of the nitrogen flow on the properties of Si–C–N amorphous thin films produced by magnetron sputtering |
| title_short | Effect of the nitrogen flow on the properties of Si–C–N amorphous thin films produced by magnetron sputtering |
| title_sort | effect of the nitrogen flow on the properties of si–c–n amorphous thin films produced by magnetron sputtering |
| url | http://jnas.nbuv.gov.ua/article/UJRN-0000694123 |
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