Dopant depth profile modification during mass Spectrometric analysis of multilayer nanostructures

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Bibliographic Details
Date:	2015
Main Authors:	A. A. Efremov, V. G. Litovchenko, V. P. Melnik, O. S. Oberemok, V. G. Popov, B. M. Romanyuk
Format:	Article
Language:	English
Published:	2015
Series:	Ukrainian journal of physics
Online Access:	http://jnas.nbuv.gov.ua/article/UJRN-0000701174
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Journal Title:	Library portal of National Academy of Sciences of Ukraine \| LibNAS

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Library portal of National Academy of Sciences of Ukraine | LibNAS

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