Shapovalov, A. P., Korotash, I. V., Rudenko, E. M., Sizov, F. F., Dubyna, D. S., Osipov, L. S., . . . Korchovyi, A. A. (2015). Structure and optical properties of AlN films obtained using the cathodic arc plasma deposition technique.
Chicago Style (17th ed.) CitationShapovalov, A. P., I. V. Korotash, E. M. Rudenko, F. F. Sizov, D. S. Dubyna, L. S. Osipov, Yu Polotskiy, Z. F. Tsybrii, and A. A. Korchovyi. Structure and Optical Properties of AlN Films Obtained Using the Cathodic Arc Plasma Deposition Technique. 2015.
MLA (8th ed.) CitationShapovalov, A. P., et al. Structure and Optical Properties of AlN Films Obtained Using the Cathodic Arc Plasma Deposition Technique. 2015.
Warning: These citations may not always be 100% accurate.