Structure and optical properties of AlN films obtained using the cathodic arc plasma deposition technique
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| Datum: | 2015 |
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| Hauptverfasser: | , , , , , , , , |
| Format: | Artikel |
| Sprache: | Englisch |
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2015
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| Schriftenreihe: | Semiconductor Physics, Quantum Electronics and Optoelectronics |
| Online Zugang: | http://jnas.nbuv.gov.ua/article/UJRN-0000706494 |
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| Назва журналу: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
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Library portal of National Academy of Sciences of Ukraine | LibNAS| _version_ | 1859525949891018752 |
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| author | A. P. Shapovalov I. V. Korotash E. M. Rudenko F. F. Sizov D. S. Dubyna L. S. Osipov Yu. Polotskiy Z. F. Tsybrii A. A. Korchovyi |
| author_facet | A. P. Shapovalov I. V. Korotash E. M. Rudenko F. F. Sizov D. S. Dubyna L. S. Osipov Yu. Polotskiy Z. F. Tsybrii A. A. Korchovyi |
| author_sort | A. P. Shapovalov |
| collection | Open-Science |
| first_indexed | 2025-07-22T05:01:09Z |
| format | Article |
| id | open-sciencenbuvgovua-65494 |
| institution | Library portal of National Academy of Sciences of Ukraine | LibNAS |
| language | English |
| last_indexed | 2025-07-22T05:01:09Z |
| publishDate | 2015 |
| record_format | dspace |
| series | Semiconductor Physics, Quantum Electronics and Optoelectronics |
| spelling | open-sciencenbuvgovua-654942024-04-16T13:18:25Z Structure and optical properties of AlN films obtained using the cathodic arc plasma deposition technique A. P. Shapovalov I. V. Korotash E. M. Rudenko F. F. Sizov D. S. Dubyna L. S. Osipov Yu. Polotskiy Z. F. Tsybrii A. A. Korchovyi 1560-8034 2015 en Semiconductor Physics, Quantum Electronics and Optoelectronics http://jnas.nbuv.gov.ua/article/UJRN-0000706494 Article |
| spellingShingle | Semiconductor Physics, Quantum Electronics and Optoelectronics A. P. Shapovalov I. V. Korotash E. M. Rudenko F. F. Sizov D. S. Dubyna L. S. Osipov Yu. Polotskiy Z. F. Tsybrii A. A. Korchovyi Structure and optical properties of AlN films obtained using the cathodic arc plasma deposition technique |
| title | Structure and optical properties of AlN films obtained using the cathodic arc plasma deposition technique |
| title_full | Structure and optical properties of AlN films obtained using the cathodic arc plasma deposition technique |
| title_fullStr | Structure and optical properties of AlN films obtained using the cathodic arc plasma deposition technique |
| title_full_unstemmed | Structure and optical properties of AlN films obtained using the cathodic arc plasma deposition technique |
| title_short | Structure and optical properties of AlN films obtained using the cathodic arc plasma deposition technique |
| title_sort | structure and optical properties of aln films obtained using the cathodic arc plasma deposition technique |
| url | http://jnas.nbuv.gov.ua/article/UJRN-0000706494 |
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