Structure and optical properties of AlN films obtained using the cathodic arc plasma deposition technique
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| Дата: | 2015 |
|---|---|
| Автори: | , , , , , , , , |
| Формат: | Стаття |
| Мова: | English |
| Опубліковано: |
2015
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| Назва видання: | Semiconductor Physics, Quantum Electronics and Optoelectronics |
| Онлайн доступ: | http://jnas.nbuv.gov.ua/article/UJRN-0000706494 |
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| Назва журналу: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
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Library portal of National Academy of Sciences of Ukraine | LibNAS| id |
open-sciencenbuvgovua-65494 |
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dspace |
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open-sciencenbuvgovua-654942024-04-16T13:18:25Z Structure and optical properties of AlN films obtained using the cathodic arc plasma deposition technique A. P. Shapovalov I. V. Korotash E. M. Rudenko F. F. Sizov D. S. Dubyna L. S. Osipov Yu. Polotskiy Z. F. Tsybrii A. A. Korchovyi 1560-8034 2015 en Semiconductor Physics, Quantum Electronics and Optoelectronics http://jnas.nbuv.gov.ua/article/UJRN-0000706494 Article |
| institution |
Library portal of National Academy of Sciences of Ukraine | LibNAS |
| collection |
Open-Science |
| language |
English |
| series |
Semiconductor Physics, Quantum Electronics and Optoelectronics |
| spellingShingle |
Semiconductor Physics, Quantum Electronics and Optoelectronics A. P. Shapovalov I. V. Korotash E. M. Rudenko F. F. Sizov D. S. Dubyna L. S. Osipov Yu. Polotskiy Z. F. Tsybrii A. A. Korchovyi Structure and optical properties of AlN films obtained using the cathodic arc plasma deposition technique |
| format |
Article |
| author |
A. P. Shapovalov I. V. Korotash E. M. Rudenko F. F. Sizov D. S. Dubyna L. S. Osipov Yu. Polotskiy Z. F. Tsybrii A. A. Korchovyi |
| author_facet |
A. P. Shapovalov I. V. Korotash E. M. Rudenko F. F. Sizov D. S. Dubyna L. S. Osipov Yu. Polotskiy Z. F. Tsybrii A. A. Korchovyi |
| author_sort |
A. P. Shapovalov |
| title |
Structure and optical properties of AlN films obtained using the cathodic arc plasma deposition technique |
| title_short |
Structure and optical properties of AlN films obtained using the cathodic arc plasma deposition technique |
| title_full |
Structure and optical properties of AlN films obtained using the cathodic arc plasma deposition technique |
| title_fullStr |
Structure and optical properties of AlN films obtained using the cathodic arc plasma deposition technique |
| title_full_unstemmed |
Structure and optical properties of AlN films obtained using the cathodic arc plasma deposition technique |
| title_sort |
structure and optical properties of aln films obtained using the cathodic arc plasma deposition technique |
| publishDate |
2015 |
| url |
http://jnas.nbuv.gov.ua/article/UJRN-0000706494 |
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2024-04-17T04:45:08Z |
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