Effect of electron irradiation on transparent conductive films ZnO:Al deposited at different power sputtering - D. V. Myroniuk; A. I. Ievtushenko; G. V. Lashkarev; V. T. Maslyuk; I. I. Timofeeva; V. A. Baturin; O. Y. Karpenko; V. M. Kuznetsov; M. V. Dranchuk (Semiconductor Physics, Quantum Electronics and Optoelectronics, 2015)