Voids' layer structures in silicon irradiated with high doses of high-energy helium ions
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| Дата: | 2015 |
|---|---|
| Автори: | , , , , |
| Формат: | Стаття |
| Мова: | English |
| Опубліковано: |
2015
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| Назва видання: | Semiconductor Physics, Quantum Electronics and Optoelectronics |
| Онлайн доступ: | http://jnas.nbuv.gov.ua/article/UJRN-0000714276 |
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| Назва журналу: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
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Library portal of National Academy of Sciences of Ukraine | LibNAS| id |
open-sciencenbuvgovua-65598 |
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open-sciencenbuvgovua-655982024-04-16T13:19:01Z Voids' layer structures in silicon irradiated with high doses of high-energy helium ions M. I. Starchyk L. S. Marchenko M. B. Pinkovska G. G. Shmatko V. I. Varnina 1560-8034 2015 en Semiconductor Physics, Quantum Electronics and Optoelectronics http://jnas.nbuv.gov.ua/article/UJRN-0000714276 Article |
| institution |
Library portal of National Academy of Sciences of Ukraine | LibNAS |
| collection |
Open-Science |
| language |
English |
| series |
Semiconductor Physics, Quantum Electronics and Optoelectronics |
| spellingShingle |
Semiconductor Physics, Quantum Electronics and Optoelectronics M. I. Starchyk L. S. Marchenko M. B. Pinkovska G. G. Shmatko V. I. Varnina Voids' layer structures in silicon irradiated with high doses of high-energy helium ions |
| format |
Article |
| author |
M. I. Starchyk L. S. Marchenko M. B. Pinkovska G. G. Shmatko V. I. Varnina |
| author_facet |
M. I. Starchyk L. S. Marchenko M. B. Pinkovska G. G. Shmatko V. I. Varnina |
| author_sort |
M. I. Starchyk |
| title |
Voids' layer structures in silicon irradiated with high doses of high-energy helium ions |
| title_short |
Voids' layer structures in silicon irradiated with high doses of high-energy helium ions |
| title_full |
Voids' layer structures in silicon irradiated with high doses of high-energy helium ions |
| title_fullStr |
Voids' layer structures in silicon irradiated with high doses of high-energy helium ions |
| title_full_unstemmed |
Voids' layer structures in silicon irradiated with high doses of high-energy helium ions |
| title_sort |
voids' layer structures in silicon irradiated with high doses of high-energy helium ions |
| publishDate |
2015 |
| url |
http://jnas.nbuv.gov.ua/article/UJRN-0000714276 |
| work_keys_str_mv |
AT mistarchyk voids039layerstructuresinsiliconirradiatedwithhighdosesofhighenergyheliumions AT lsmarchenko voids039layerstructuresinsiliconirradiatedwithhighdosesofhighenergyheliumions AT mbpinkovska voids039layerstructuresinsiliconirradiatedwithhighdosesofhighenergyheliumions AT ggshmatko voids039layerstructuresinsiliconirradiatedwithhighdosesofhighenergyheliumions AT vivarnina voids039layerstructuresinsiliconirradiatedwithhighdosesofhighenergyheliumions |
| first_indexed |
2024-04-17T04:45:33Z |
| last_indexed |
2024-04-17T04:45:33Z |
| _version_ |
1796884120411832320 |