Voids' layer structures in silicon irradiated with high doses of high-energy helium ions
Збережено в:
| Дата: | 2015 |
|---|---|
| Автори: | , , , , |
| Формат: | Стаття |
| Мова: | Англійська |
| Опубліковано: |
2015
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| Назва видання: | Semiconductor Physics, Quantum Electronics and Optoelectronics |
| Онлайн доступ: | http://jnas.nbuv.gov.ua/article/UJRN-0000714276 |
| Теги: |
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| Назва журналу: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
Репозитарії
Library portal of National Academy of Sciences of Ukraine | LibNAS| _version_ | 1859526017313406976 |
|---|---|
| author | M. I. Starchyk L. S. Marchenko M. B. Pinkovska G. G. Shmatko V. I. Varnina |
| author_facet | M. I. Starchyk L. S. Marchenko M. B. Pinkovska G. G. Shmatko V. I. Varnina |
| author_sort | M. I. Starchyk |
| collection | Open-Science |
| first_indexed | 2025-07-22T05:03:28Z |
| format | Article |
| id | open-sciencenbuvgovua-65598 |
| institution | Library portal of National Academy of Sciences of Ukraine | LibNAS |
| language | English |
| last_indexed | 2025-07-22T05:03:28Z |
| publishDate | 2015 |
| record_format | dspace |
| series | Semiconductor Physics, Quantum Electronics and Optoelectronics |
| spelling | open-sciencenbuvgovua-655982024-04-16T13:19:01Z Voids' layer structures in silicon irradiated with high doses of high-energy helium ions M. I. Starchyk L. S. Marchenko M. B. Pinkovska G. G. Shmatko V. I. Varnina 1560-8034 2015 en Semiconductor Physics, Quantum Electronics and Optoelectronics http://jnas.nbuv.gov.ua/article/UJRN-0000714276 Article |
| spellingShingle | Semiconductor Physics, Quantum Electronics and Optoelectronics M. I. Starchyk L. S. Marchenko M. B. Pinkovska G. G. Shmatko V. I. Varnina Voids' layer structures in silicon irradiated with high doses of high-energy helium ions |
| title | Voids' layer structures in silicon irradiated with high doses of high-energy helium ions |
| title_full | Voids' layer structures in silicon irradiated with high doses of high-energy helium ions |
| title_fullStr | Voids' layer structures in silicon irradiated with high doses of high-energy helium ions |
| title_full_unstemmed | Voids' layer structures in silicon irradiated with high doses of high-energy helium ions |
| title_short | Voids' layer structures in silicon irradiated with high doses of high-energy helium ions |
| title_sort | voids' layer structures in silicon irradiated with high doses of high-energy helium ions |
| url | http://jnas.nbuv.gov.ua/article/UJRN-0000714276 |
| work_keys_str_mv | AT mistarchyk voidsamp039layerstructuresinsiliconirradiatedwithhighdosesofhighenergyheliumions AT lsmarchenko voidsamp039layerstructuresinsiliconirradiatedwithhighdosesofhighenergyheliumions AT mbpinkovska voidsamp039layerstructuresinsiliconirradiatedwithhighdosesofhighenergyheliumions AT ggshmatko voidsamp039layerstructuresinsiliconirradiatedwithhighdosesofhighenergyheliumions AT vivarnina voidsamp039layerstructuresinsiliconirradiatedwithhighdosesofhighenergyheliumions |