Pashchenko, G. A., Kravetskyi, Y., & Fomin, A. V. (2015). Modeling the process of removal aimed at cut traces on semiconductor wafers by using the method of contactless chemical-and-dynamical polishing.
Chicago Style (17th ed.) CitationPashchenko, G. A., Yu Kravetskyi, and A. V. Fomin. Modeling the Process of Removal Aimed at Cut Traces on Semiconductor Wafers by Using the Method of Contactless Chemical-and-dynamical Polishing. 2015.
MLA (8th ed.) CitationPashchenko, G. A., et al. Modeling the Process of Removal Aimed at Cut Traces on Semiconductor Wafers by Using the Method of Contactless Chemical-and-dynamical Polishing. 2015.
Warning: These citations may not always be 100% accurate.