Nanopatterning Au chips for SPR refractometer by using interference lithography and chalcogenide photoresist
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| Datum: | 2015 |
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| Hauptverfasser: | , , , , , , , , |
| Format: | Artikel |
| Sprache: | English |
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2015
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| Schriftenreihe: | Semiconductor Physics, Quantum Electronics and Optoelectronics |
| Online Zugang: | http://jnas.nbuv.gov.ua/article/UJRN-0000714337 |
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| Назва журналу: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
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open-sciencenbuvgovua-656232024-04-16T13:19:13Z Nanopatterning Au chips for SPR refractometer by using interference lithography and chalcogenide photoresist V. A. Danko G. V. Dorozinsky I. Z. Indutnyi V. I. Mynko Yu. V. Ushenin P. E. Shepeliavyi M. V. Lukaniuk A. A. Korchovyi R. V. Khrystosenko 1560-8034 2015 en Semiconductor Physics, Quantum Electronics and Optoelectronics http://jnas.nbuv.gov.ua/article/UJRN-0000714337 Article |
| institution |
Library portal of National Academy of Sciences of Ukraine | LibNAS |
| collection |
Open-Science |
| language |
English |
| series |
Semiconductor Physics, Quantum Electronics and Optoelectronics |
| spellingShingle |
Semiconductor Physics, Quantum Electronics and Optoelectronics V. A. Danko G. V. Dorozinsky I. Z. Indutnyi V. I. Mynko Yu. V. Ushenin P. E. Shepeliavyi M. V. Lukaniuk A. A. Korchovyi R. V. Khrystosenko Nanopatterning Au chips for SPR refractometer by using interference lithography and chalcogenide photoresist |
| format |
Article |
| author |
V. A. Danko G. V. Dorozinsky I. Z. Indutnyi V. I. Mynko Yu. V. Ushenin P. E. Shepeliavyi M. V. Lukaniuk A. A. Korchovyi R. V. Khrystosenko |
| author_facet |
V. A. Danko G. V. Dorozinsky I. Z. Indutnyi V. I. Mynko Yu. V. Ushenin P. E. Shepeliavyi M. V. Lukaniuk A. A. Korchovyi R. V. Khrystosenko |
| author_sort |
V. A. Danko |
| title |
Nanopatterning Au chips for SPR refractometer by using interference lithography and chalcogenide photoresist |
| title_short |
Nanopatterning Au chips for SPR refractometer by using interference lithography and chalcogenide photoresist |
| title_full |
Nanopatterning Au chips for SPR refractometer by using interference lithography and chalcogenide photoresist |
| title_fullStr |
Nanopatterning Au chips for SPR refractometer by using interference lithography and chalcogenide photoresist |
| title_full_unstemmed |
Nanopatterning Au chips for SPR refractometer by using interference lithography and chalcogenide photoresist |
| title_sort |
nanopatterning au chips for spr refractometer by using interference lithography and chalcogenide photoresist |
| publishDate |
2015 |
| url |
http://jnas.nbuv.gov.ua/article/UJRN-0000714337 |
| work_keys_str_mv |
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| first_indexed |
2025-07-22T05:05:06Z |
| last_indexed |
2025-07-22T05:05:06Z |
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