Nanopatterning Au chips for SPR refractometer by using interference lithography and chalcogenide photoresist

Nanopatterning Au chips for SPR refractometer by using interference lithography and chalcogenide photoresist

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Bibliographic Details
Date:2015
Main Authors: V. A. Danko, G. V. Dorozinsky, I. Z. Indutnyi, V. I. Mynko, Yu. V. Ushenin, P. E. Shepeliavyi, M. V. Lukaniuk, A. A. Korchovyi, R. V. Khrystosenko
Format: Article
Language:English
Published: 2015
Series:Semiconductor Physics, Quantum Electronics and Optoelectronics
Online Access:http://jnas.nbuv.gov.ua/article/UJRN-0000714337
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Journal Title:Library portal of National Academy of Sciences of Ukraine | LibNAS

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Library portal of National Academy of Sciences of Ukraine | LibNAS
id open-sciencenbuvgovua-65623
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spelling open-sciencenbuvgovua-656232024-04-16T13:19:13Z Nanopatterning Au chips for SPR refractometer by using interference lithography and chalcogenide photoresist V. A. Danko G. V. Dorozinsky I. Z. Indutnyi V. I. Mynko Yu. V. Ushenin P. E. Shepeliavyi M. V. Lukaniuk A. A. Korchovyi R. V. Khrystosenko 1560-8034 2015 en Semiconductor Physics, Quantum Electronics and Optoelectronics http://jnas.nbuv.gov.ua/article/UJRN-0000714337 Article
institution Library portal of National Academy of Sciences of Ukraine | LibNAS
collection Open-Science
language English
series Semiconductor Physics, Quantum Electronics and Optoelectronics
spellingShingle Semiconductor Physics, Quantum Electronics and Optoelectronics
V. A. Danko
G. V. Dorozinsky
I. Z. Indutnyi
V. I. Mynko
Yu. V. Ushenin
P. E. Shepeliavyi
M. V. Lukaniuk
A. A. Korchovyi
R. V. Khrystosenko
Nanopatterning Au chips for SPR refractometer by using interference lithography and chalcogenide photoresist
format Article
author V. A. Danko
G. V. Dorozinsky
I. Z. Indutnyi
V. I. Mynko
Yu. V. Ushenin
P. E. Shepeliavyi
M. V. Lukaniuk
A. A. Korchovyi
R. V. Khrystosenko
author_facet V. A. Danko
G. V. Dorozinsky
I. Z. Indutnyi
V. I. Mynko
Yu. V. Ushenin
P. E. Shepeliavyi
M. V. Lukaniuk
A. A. Korchovyi
R. V. Khrystosenko
author_sort V. A. Danko
title Nanopatterning Au chips for SPR refractometer by using interference lithography and chalcogenide photoresist
title_short Nanopatterning Au chips for SPR refractometer by using interference lithography and chalcogenide photoresist
title_full Nanopatterning Au chips for SPR refractometer by using interference lithography and chalcogenide photoresist
title_fullStr Nanopatterning Au chips for SPR refractometer by using interference lithography and chalcogenide photoresist
title_full_unstemmed Nanopatterning Au chips for SPR refractometer by using interference lithography and chalcogenide photoresist
title_sort nanopatterning au chips for spr refractometer by using interference lithography and chalcogenide photoresist
publishDate 2015
url http://jnas.nbuv.gov.ua/article/UJRN-0000714337
work_keys_str_mv AT vadanko nanopatterningauchipsforsprrefractometerbyusinginterferencelithographyandchalcogenidephotoresist
AT gvdorozinsky nanopatterningauchipsforsprrefractometerbyusinginterferencelithographyandchalcogenidephotoresist
AT izindutnyi nanopatterningauchipsforsprrefractometerbyusinginterferencelithographyandchalcogenidephotoresist
AT vimynko nanopatterningauchipsforsprrefractometerbyusinginterferencelithographyandchalcogenidephotoresist
AT yuvushenin nanopatterningauchipsforsprrefractometerbyusinginterferencelithographyandchalcogenidephotoresist
AT peshepeliavyi nanopatterningauchipsforsprrefractometerbyusinginterferencelithographyandchalcogenidephotoresist
AT mvlukaniuk nanopatterningauchipsforsprrefractometerbyusinginterferencelithographyandchalcogenidephotoresist
AT aakorchovyi nanopatterningauchipsforsprrefractometerbyusinginterferencelithographyandchalcogenidephotoresist
AT rvkhrystosenko nanopatterningauchipsforsprrefractometerbyusinginterferencelithographyandchalcogenidephotoresist
first_indexed 2025-07-22T05:05:06Z
last_indexed 2025-07-22T05:05:06Z
_version_ 1850418152684388352

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