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Nanopatterning Au chips for SPR refractometer by using interference lithography and chalcogenide photoresist

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Bibliographic Details
Date:	2015
Main Authors:	V. A. Danko, G. V. Dorozinsky, I. Z. Indutnyi, V. I. Mynko, Yu. V. Ushenin, P. E. Shepeliavyi, M. V. Lukaniuk, A. A. Korchovyi, R. V. Khrystosenko
Format:	Article
Language:	English
Published:	2015
Series:	Semiconductor Physics, Quantum Electronics and Optoelectronics
Online Access:	http://jnas.nbuv.gov.ua/article/UJRN-0000714337
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Journal Title:	Library portal of National Academy of Sciences of Ukraine \| LibNAS

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Library portal of National Academy of Sciences of Ukraine | LibNAS

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