The sputtering of silicon and carbon targets by accelerated ion by the fullerene C60
Збережено в:
| Дата: | 2015 |
|---|---|
| Автори: | , , , , , |
| Формат: | Стаття |
| Мова: | English |
| Опубліковано: |
2015
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| Назва видання: | Physical surface engineering |
| Онлайн доступ: | http://jnas.nbuv.gov.ua/article/UJRN-0001045140 |
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| Назва журналу: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
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Library portal of National Academy of Sciences of Ukraine | LibNAS| id |
open-sciencenbuvgovua-68313 |
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| record_format |
dspace |
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open-sciencenbuvgovua-683132024-04-16T13:33:35Z The sputtering of silicon and carbon targets by accelerated ion by the fullerene C60 M. V. Maleev E. N. Zubarev V. E. Pukha A. N. Drozdov A. S. Vus Ju. Devizenko 1999-8074 2015 en Physical surface engineering http://jnas.nbuv.gov.ua/article/UJRN-0001045140 Article |
| institution |
Library portal of National Academy of Sciences of Ukraine | LibNAS |
| collection |
Open-Science |
| language |
English |
| series |
Physical surface engineering |
| spellingShingle |
Physical surface engineering M. V. Maleev E. N. Zubarev V. E. Pukha A. N. Drozdov A. S. Vus Ju. Devizenko The sputtering of silicon and carbon targets by accelerated ion by the fullerene C60 |
| format |
Article |
| author |
M. V. Maleev E. N. Zubarev V. E. Pukha A. N. Drozdov A. S. Vus Ju. Devizenko |
| author_facet |
M. V. Maleev E. N. Zubarev V. E. Pukha A. N. Drozdov A. S. Vus Ju. Devizenko |
| author_sort |
M. V. Maleev |
| title |
The sputtering of silicon and carbon targets by accelerated ion by the fullerene C60 |
| title_short |
The sputtering of silicon and carbon targets by accelerated ion by the fullerene C60 |
| title_full |
The sputtering of silicon and carbon targets by accelerated ion by the fullerene C60 |
| title_fullStr |
The sputtering of silicon and carbon targets by accelerated ion by the fullerene C60 |
| title_full_unstemmed |
The sputtering of silicon and carbon targets by accelerated ion by the fullerene C60 |
| title_sort |
sputtering of silicon and carbon targets by accelerated ion by the fullerene c60 |
| publishDate |
2015 |
| url |
http://jnas.nbuv.gov.ua/article/UJRN-0001045140 |
| work_keys_str_mv |
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| first_indexed |
2024-04-17T04:56:33Z |
| last_indexed |
2024-04-17T04:56:33Z |
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