The sputtering of silicon and carbon targets by accelerated ion by the fullerene C60

The sputtering of silicon and carbon targets by accelerated ion by the fullerene C60

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Bibliographic Details
Date:2015
Main Authors: M. V. Maleev, E. N. Zubarev, V. E. Pukha, A. N. Drozdov, A. S. Vus, Ju. Devizenko
Format: Article
Language:English
Published: 2015
Series:Physical surface engineering
Online Access:http://jnas.nbuv.gov.ua/article/UJRN-0001045140
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Library portal of National Academy of Sciences of Ukraine | LibNAS
id open-sciencenbuvgovua-68313
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spelling open-sciencenbuvgovua-683132024-04-16T13:33:35Z The sputtering of silicon and carbon targets by accelerated ion by the fullerene C60 M. V. Maleev E. N. Zubarev V. E. Pukha A. N. Drozdov A. S. Vus Ju. Devizenko 1999-8074 2015 en Physical surface engineering http://jnas.nbuv.gov.ua/article/UJRN-0001045140 Article
institution Library portal of National Academy of Sciences of Ukraine | LibNAS
collection Open-Science
language English
series Physical surface engineering
spellingShingle Physical surface engineering
M. V. Maleev
E. N. Zubarev
V. E. Pukha
A. N. Drozdov
A. S. Vus
Ju. Devizenko
The sputtering of silicon and carbon targets by accelerated ion by the fullerene C60
format Article
author M. V. Maleev
E. N. Zubarev
V. E. Pukha
A. N. Drozdov
A. S. Vus
Ju. Devizenko
author_facet M. V. Maleev
E. N. Zubarev
V. E. Pukha
A. N. Drozdov
A. S. Vus
Ju. Devizenko
author_sort M. V. Maleev
title The sputtering of silicon and carbon targets by accelerated ion by the fullerene C60
title_short The sputtering of silicon and carbon targets by accelerated ion by the fullerene C60
title_full The sputtering of silicon and carbon targets by accelerated ion by the fullerene C60
title_fullStr The sputtering of silicon and carbon targets by accelerated ion by the fullerene C60
title_full_unstemmed The sputtering of silicon and carbon targets by accelerated ion by the fullerene C60
title_sort sputtering of silicon and carbon targets by accelerated ion by the fullerene c60
publishDate 2015
url http://jnas.nbuv.gov.ua/article/UJRN-0001045140
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first_indexed 2025-07-22T05:52:32Z
last_indexed 2025-07-22T05:52:32Z
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