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The sputtering of silicon and carbon targets by accelerated ion by the fullerene C60

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Bibliographic Details
Date:	2015
Main Authors:	M. V. Maleev, E. N. Zubarev, V. E. Pukha, A. N. Drozdov, A. S. Vus, Ju. Devizenko
Format:	Article
Language:	English
Published:	2015
Series:	Physical surface engineering
Online Access:	http://jnas.nbuv.gov.ua/article/UJRN-0001045140
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Journal Title:	Library portal of National Academy of Sciences of Ukraine \| LibNAS

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Library portal of National Academy of Sciences of Ukraine | LibNAS

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