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The use of powder cathodes for the deposition of Ti-Si-N coatings from a filtered vacuum arc plasma

The use of powder cathodes for the deposition of Ti-Si-N coatings from a filtered vacuum arc plasma

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Bibliographic Details
Main Authors: V. V. Vasilev, A. A. Luchaninov, E. N. Reshetnjak, V. E. Strelnitskij, G. N. Tolmacheva, G. A. Pribytkov, A. V. Gurskikh, M. G. Krinitsyn
Format: Article
Language:English
Published: 2015
Series:Physical surface engineering
Online Access:http://jnas.nbuv.gov.ua/article/UJRN-0001059741
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