The use of powder cathodes for the deposition of Ti-Si-N coatings from a filtered vacuum arc plasma
Збережено в:
Дата: | 2015 |
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Автори: | , , , , , , , |
Формат: | Стаття |
Мова: | English |
Опубліковано: |
2015
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Назва видання: | Physical surface engineering |
Онлайн доступ: | http://jnas.nbuv.gov.ua/article/UJRN-0001059741 |
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Назва журналу: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
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open-sciencenbuvgovua-684052024-04-16T13:34:00Z The use of powder cathodes for the deposition of Ti-Si-N coatings from a filtered vacuum arc plasma V. V. Vasilev A. A. Luchaninov E. N. Reshetnjak V. E. Strelnitskij G. N. Tolmacheva G. A. Pribytkov A. V. Gurskikh M. G. Krinitsyn 1999-8074 2015 en Physical surface engineering http://jnas.nbuv.gov.ua/article/UJRN-0001059741 Article |
institution |
Library portal of National Academy of Sciences of Ukraine | LibNAS |
collection |
Open-Science |
language |
English |
series |
Physical surface engineering |
spellingShingle |
Physical surface engineering V. V. Vasilev A. A. Luchaninov E. N. Reshetnjak V. E. Strelnitskij G. N. Tolmacheva G. A. Pribytkov A. V. Gurskikh M. G. Krinitsyn The use of powder cathodes for the deposition of Ti-Si-N coatings from a filtered vacuum arc plasma |
format |
Article |
author |
V. V. Vasilev A. A. Luchaninov E. N. Reshetnjak V. E. Strelnitskij G. N. Tolmacheva G. A. Pribytkov A. V. Gurskikh M. G. Krinitsyn |
author_facet |
V. V. Vasilev A. A. Luchaninov E. N. Reshetnjak V. E. Strelnitskij G. N. Tolmacheva G. A. Pribytkov A. V. Gurskikh M. G. Krinitsyn |
author_sort |
V. V. Vasilev |
title |
The use of powder cathodes for the deposition of Ti-Si-N coatings from a filtered vacuum arc plasma |
title_short |
The use of powder cathodes for the deposition of Ti-Si-N coatings from a filtered vacuum arc plasma |
title_full |
The use of powder cathodes for the deposition of Ti-Si-N coatings from a filtered vacuum arc plasma |
title_fullStr |
The use of powder cathodes for the deposition of Ti-Si-N coatings from a filtered vacuum arc plasma |
title_full_unstemmed |
The use of powder cathodes for the deposition of Ti-Si-N coatings from a filtered vacuum arc plasma |
title_sort |
use of powder cathodes for the deposition of ti-si-n coatings from a filtered vacuum arc plasma |
publishDate |
2015 |
url |
http://jnas.nbuv.gov.ua/article/UJRN-0001059741 |
work_keys_str_mv |
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first_indexed |
2024-04-17T04:56:56Z |
last_indexed |
2024-04-17T04:56:56Z |
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