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The use of powder cathodes for the deposition of Ti-Si-N coatings from a filtered vacuum arc plasma

The use of powder cathodes for the deposition of Ti-Si-N coatings from a filtered vacuum arc plasma

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Bibliographic Details
Main Authors: V. V. Vasilev, A. A. Luchaninov, E. N. Reshetnjak, V. E. Strelnitskij, G. N. Tolmacheva, G. A. Pribytkov, A. V. Gurskikh, M. G. Krinitsyn
Format: Article
Language:English
Published: 2015
Series:Physical surface engineering
Online Access:http://jnas.nbuv.gov.ua/article/UJRN-0001059741
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spelling open-sciencenbuvgovua-684052024-04-16T13:34:00Z The use of powder cathodes for the deposition of Ti-Si-N coatings from a filtered vacuum arc plasma V. V. Vasilev A. A. Luchaninov E. N. Reshetnjak V. E. Strelnitskij G. N. Tolmacheva G. A. Pribytkov A. V. Gurskikh M. G. Krinitsyn 1999-8074 2015 en Physical surface engineering http://jnas.nbuv.gov.ua/article/UJRN-0001059741 Article
institution Library portal of National Academy of Sciences of Ukraine | LibNAS
collection Open-Science
language English
series Physical surface engineering
spellingShingle Physical surface engineering
V. V. Vasilev
A. A. Luchaninov
E. N. Reshetnjak
V. E. Strelnitskij
G. N. Tolmacheva
G. A. Pribytkov
A. V. Gurskikh
M. G. Krinitsyn
The use of powder cathodes for the deposition of Ti-Si-N coatings from a filtered vacuum arc plasma
format Article
author V. V. Vasilev
A. A. Luchaninov
E. N. Reshetnjak
V. E. Strelnitskij
G. N. Tolmacheva
G. A. Pribytkov
A. V. Gurskikh
M. G. Krinitsyn
author_facet V. V. Vasilev
A. A. Luchaninov
E. N. Reshetnjak
V. E. Strelnitskij
G. N. Tolmacheva
G. A. Pribytkov
A. V. Gurskikh
M. G. Krinitsyn
author_sort V. V. Vasilev
title The use of powder cathodes for the deposition of Ti-Si-N coatings from a filtered vacuum arc plasma
title_short The use of powder cathodes for the deposition of Ti-Si-N coatings from a filtered vacuum arc plasma
title_full The use of powder cathodes for the deposition of Ti-Si-N coatings from a filtered vacuum arc plasma
title_fullStr The use of powder cathodes for the deposition of Ti-Si-N coatings from a filtered vacuum arc plasma
title_full_unstemmed The use of powder cathodes for the deposition of Ti-Si-N coatings from a filtered vacuum arc plasma
title_sort use of powder cathodes for the deposition of ti-si-n coatings from a filtered vacuum arc plasma
publishDate 2015
url http://jnas.nbuv.gov.ua/article/UJRN-0001059741
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first_indexed 2024-04-17T04:56:56Z
last_indexed 2024-04-17T04:56:56Z
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