The use of powder cathodes for the deposition of Ti-Si-N coatings from a filtered vacuum arc plasma - V. V. Vasilev; A. A. Luchaninov; E. N. Reshetnjak; V. E. Strelnitskij; G. N. Tolmacheva; G. A. Pribytkov; A. V. Gurskikh; M. G. Krinitsyn (Physical surface engineering, 2015)