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Microwave high-resolution scanning heating in the technology of micro- and nanoelectronics

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Bibliographic Details
Date:	2015
Main Authors:	Ju. E. Gordienko, M. I. Pjatajkina, A. V. Polishchuk
Format:	Article
Language:	English
Published:	2015
Series:	Physical surface engineering
Online Access:	http://jnas.nbuv.gov.ua/article/UJRN-0001059748
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Journal Title:	Library portal of National Academy of Sciences of Ukraine \| LibNAS

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Library portal of National Academy of Sciences of Ukraine | LibNAS

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