Stationary regimes of low pressure magnetron discharge
Збережено в:
| Дата: | 2015 |
|---|---|
| Автори: | , , |
| Формат: | Стаття |
| Мова: | English |
| Опубліковано: |
2015
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| Назва видання: | Physical surface engineering |
| Онлайн доступ: | http://jnas.nbuv.gov.ua/article/UJRN-0001059755 |
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| Назва журналу: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
Репозитарії
Library portal of National Academy of Sciences of Ukraine | LibNAS| id |
open-sciencenbuvgovua-68419 |
|---|---|
| record_format |
dspace |
| spelling |
open-sciencenbuvgovua-684192024-04-16T13:34:10Z Stationary regimes of low pressure magnetron discharge A. V. Zykov S. V. Dudin S. D. Jakovin 1999-8074 2015 en Physical surface engineering http://jnas.nbuv.gov.ua/article/UJRN-0001059755 Article |
| institution |
Library portal of National Academy of Sciences of Ukraine | LibNAS |
| collection |
Open-Science |
| language |
English |
| series |
Physical surface engineering |
| spellingShingle |
Physical surface engineering A. V. Zykov S. V. Dudin S. D. Jakovin Stationary regimes of low pressure magnetron discharge |
| format |
Article |
| author |
A. V. Zykov S. V. Dudin S. D. Jakovin |
| author_facet |
A. V. Zykov S. V. Dudin S. D. Jakovin |
| author_sort |
A. V. Zykov |
| title |
Stationary regimes of low pressure magnetron discharge |
| title_short |
Stationary regimes of low pressure magnetron discharge |
| title_full |
Stationary regimes of low pressure magnetron discharge |
| title_fullStr |
Stationary regimes of low pressure magnetron discharge |
| title_full_unstemmed |
Stationary regimes of low pressure magnetron discharge |
| title_sort |
stationary regimes of low pressure magnetron discharge |
| publishDate |
2015 |
| url |
http://jnas.nbuv.gov.ua/article/UJRN-0001059755 |
| work_keys_str_mv |
AT avzykov stationaryregimesoflowpressuremagnetrondischarge AT svdudin stationaryregimesoflowpressuremagnetrondischarge AT sdjakovin stationaryregimesoflowpressuremagnetrondischarge |
| first_indexed |
2025-07-22T05:55:17Z |
| last_indexed |
2025-07-22T05:55:17Z |
| _version_ |
1850418466662645760 |