Stationary regimes of low pressure magnetron discharge

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Datum:2015
Hauptverfasser: A. V. Zykov, S. V. Dudin, S. D. Jakovin
Format: Artikel
Sprache:English
Veröffentlicht: 2015
Schriftenreihe:Physical surface engineering
Online Zugang:http://jnas.nbuv.gov.ua/article/UJRN-0001059755
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Назва журналу:Library portal of National Academy of Sciences of Ukraine | LibNAS

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Library portal of National Academy of Sciences of Ukraine | LibNAS
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spelling open-sciencenbuvgovua-684192024-04-16T13:34:10Z Stationary regimes of low pressure magnetron discharge A. V. Zykov S. V. Dudin S. D. Jakovin 1999-8074 2015 en Physical surface engineering http://jnas.nbuv.gov.ua/article/UJRN-0001059755 Article
institution Library portal of National Academy of Sciences of Ukraine | LibNAS
collection Open-Science
language English
series Physical surface engineering
spellingShingle Physical surface engineering
A. V. Zykov
S. V. Dudin
S. D. Jakovin
Stationary regimes of low pressure magnetron discharge
format Article
author A. V. Zykov
S. V. Dudin
S. D. Jakovin
author_facet A. V. Zykov
S. V. Dudin
S. D. Jakovin
author_sort A. V. Zykov
title Stationary regimes of low pressure magnetron discharge
title_short Stationary regimes of low pressure magnetron discharge
title_full Stationary regimes of low pressure magnetron discharge
title_fullStr Stationary regimes of low pressure magnetron discharge
title_full_unstemmed Stationary regimes of low pressure magnetron discharge
title_sort stationary regimes of low pressure magnetron discharge
publishDate 2015
url http://jnas.nbuv.gov.ua/article/UJRN-0001059755
work_keys_str_mv AT avzykov stationaryregimesoflowpressuremagnetrondischarge
AT svdudin stationaryregimesoflowpressuremagnetrondischarge
AT sdjakovin stationaryregimesoflowpressuremagnetrondischarge
first_indexed 2025-07-22T05:55:17Z
last_indexed 2025-07-22T05:55:17Z
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