Stationary regimes of low pressure magnetron discharge
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| Datum: | 2015 |
|---|---|
| Hauptverfasser: | , , |
| Format: | Artikel |
| Sprache: | Englisch |
| Veröffentlicht: |
2015
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| Schriftenreihe: | Physical surface engineering |
| Online Zugang: | http://jnas.nbuv.gov.ua/article/UJRN-0001059755 |
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| Назва журналу: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
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Library portal of National Academy of Sciences of Ukraine | LibNAS| _version_ | 1859527621270831104 |
|---|---|
| author | A. V. Zykov S. V. Dudin S. D. Jakovin |
| author_facet | A. V. Zykov S. V. Dudin S. D. Jakovin |
| author_sort | A. V. Zykov |
| collection | Open-Science |
| first_indexed | 2025-07-22T05:55:17Z |
| format | Article |
| id | open-sciencenbuvgovua-68419 |
| institution | Library portal of National Academy of Sciences of Ukraine | LibNAS |
| language | English |
| last_indexed | 2025-07-22T05:55:17Z |
| publishDate | 2015 |
| record_format | dspace |
| series | Physical surface engineering |
| spelling | open-sciencenbuvgovua-684192024-04-16T13:34:10Z Stationary regimes of low pressure magnetron discharge A. V. Zykov S. V. Dudin S. D. Jakovin 1999-8074 2015 en Physical surface engineering http://jnas.nbuv.gov.ua/article/UJRN-0001059755 Article |
| spellingShingle | Physical surface engineering A. V. Zykov S. V. Dudin S. D. Jakovin Stationary regimes of low pressure magnetron discharge |
| title | Stationary regimes of low pressure magnetron discharge |
| title_full | Stationary regimes of low pressure magnetron discharge |
| title_fullStr | Stationary regimes of low pressure magnetron discharge |
| title_full_unstemmed | Stationary regimes of low pressure magnetron discharge |
| title_short | Stationary regimes of low pressure magnetron discharge |
| title_sort | stationary regimes of low pressure magnetron discharge |
| url | http://jnas.nbuv.gov.ua/article/UJRN-0001059755 |
| work_keys_str_mv | AT avzykov stationaryregimesoflowpressuremagnetrondischarge AT svdudin stationaryregimesoflowpressuremagnetrondischarge AT sdjakovin stationaryregimesoflowpressuremagnetrondischarge |