Formation of submicron periodic plasmon structures of large area by using the interference lithography method with vacuum photoresists - V. A. Danko; M. L. Dmytruk; I. Z. Indutnyi; S. V. Mamykin; V. I. Mynko; P. M. Lytvyn; M. V. Lukaniuk; Ye. Shepeliavyi (Optoelectronics and Semiconductor Technique, 2015)