Theoretical study on laser annealing of non-stoichiometric SiOX films
Збережено в:
| Дата: | 2014 |
|---|---|
| Автор: | |
| Формат: | Стаття |
| Мова: | English |
| Опубліковано: |
2014
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| Назва видання: | Chemistry, physics and technology of surface |
| Онлайн доступ: | http://jnas.nbuv.gov.ua/article/UJRN-0000282189 |
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| Назва журналу: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
Репозитарії
Library portal of National Academy of Sciences of Ukraine | LibNAS| id |
open-sciencenbuvgovua-70750 |
|---|---|
| record_format |
dspace |
| spelling |
open-sciencenbuvgovua-707502024-04-16T16:44:05Z Theoretical study on laser annealing of non-stoichiometric SiOX films O. O. Gavrylyuk 2079-1704 2014 en Chemistry, physics and technology of surface http://jnas.nbuv.gov.ua/article/UJRN-0000282189 Article |
| institution |
Library portal of National Academy of Sciences of Ukraine | LibNAS |
| collection |
Open-Science |
| language |
English |
| series |
Chemistry, physics and technology of surface |
| spellingShingle |
Chemistry, physics and technology of surface O. O. Gavrylyuk Theoretical study on laser annealing of non-stoichiometric SiOX films |
| format |
Article |
| author |
O. O. Gavrylyuk |
| author_facet |
O. O. Gavrylyuk |
| author_sort |
O. O. Gavrylyuk |
| title |
Theoretical study on laser annealing of non-stoichiometric SiOX films |
| title_short |
Theoretical study on laser annealing of non-stoichiometric SiOX films |
| title_full |
Theoretical study on laser annealing of non-stoichiometric SiOX films |
| title_fullStr |
Theoretical study on laser annealing of non-stoichiometric SiOX films |
| title_full_unstemmed |
Theoretical study on laser annealing of non-stoichiometric SiOX films |
| title_sort |
theoretical study on laser annealing of non-stoichiometric siox films |
| publishDate |
2014 |
| url |
http://jnas.nbuv.gov.ua/article/UJRN-0000282189 |
| work_keys_str_mv |
AT oogavrylyuk theoreticalstudyonlaserannealingofnonstoichiometricsioxfilms |
| first_indexed |
2024-04-17T05:06:29Z |
| last_indexed |
2024-04-17T05:06:29Z |
| _version_ |
1796884658893357056 |