Theoretical study on laser annealing of non-stoichiometric SiOX films
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| Date: | 2014 |
|---|---|
| Main Author: | |
| Format: | Article |
| Language: | English |
| Published: |
2014
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| Series: | Chemistry, physics and technology of surface |
| Online Access: | http://jnas.nbuv.gov.ua/article/UJRN-0000282189 |
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| Journal Title: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
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Library portal of National Academy of Sciences of Ukraine | LibNAS| _version_ | 1859528990765613056 |
|---|---|
| author | O. O. Gavrylyuk |
| author_facet | O. O. Gavrylyuk |
| author_sort | O. O. Gavrylyuk |
| collection | Open-Science |
| first_indexed | 2025-07-22T06:32:23Z |
| format | Article |
| id | open-sciencenbuvgovua-70750 |
| institution | Library portal of National Academy of Sciences of Ukraine | LibNAS |
| language | English |
| last_indexed | 2025-07-22T06:32:23Z |
| publishDate | 2014 |
| record_format | dspace |
| series | Chemistry, physics and technology of surface |
| spelling | open-sciencenbuvgovua-707502024-04-16T16:44:05Z Theoretical study on laser annealing of non-stoichiometric SiOX films O. O. Gavrylyuk 2079-1704 2014 en Chemistry, physics and technology of surface http://jnas.nbuv.gov.ua/article/UJRN-0000282189 Article |
| spellingShingle | Chemistry, physics and technology of surface O. O. Gavrylyuk Theoretical study on laser annealing of non-stoichiometric SiOX films |
| title | Theoretical study on laser annealing of non-stoichiometric SiOX films |
| title_full | Theoretical study on laser annealing of non-stoichiometric SiOX films |
| title_fullStr | Theoretical study on laser annealing of non-stoichiometric SiOX films |
| title_full_unstemmed | Theoretical study on laser annealing of non-stoichiometric SiOX films |
| title_short | Theoretical study on laser annealing of non-stoichiometric SiOX films |
| title_sort | theoretical study on laser annealing of non-stoichiometric siox films |
| url | http://jnas.nbuv.gov.ua/article/UJRN-0000282189 |
| work_keys_str_mv | AT oogavrylyuk theoreticalstudyonlaserannealingofnonstoichiometricsioxfilms |