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High-density data recording via laser thermo-lithography and ion-beam etching

High-density data recording via laser thermo-lithography and ion-beam etching

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Bibliographic Details
Main Authors: I. V. Gorbov, A. A. Kryuchyn, K. P. Grytsenko, Yu. Manko, Yu. O. Borodin
Format: Article
Language:English
Published: 2014
Series:Semiconductor Physics, Quantum Electronics and Optoelectronics
Online Access:http://jnas.nbuv.gov.ua/article/UJRN-0000352573
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id open-sciencenbuvgovua-72685
record_format dspace
spelling open-sciencenbuvgovua-726852024-04-16T17:08:36Z High-density data recording via laser thermo-lithography and ion-beam etching I. V. Gorbov A. A. Kryuchyn K. P. Grytsenko Yu. Manko Yu. O. Borodin 1560-8034 2014 en Semiconductor Physics, Quantum Electronics and Optoelectronics http://jnas.nbuv.gov.ua/article/UJRN-0000352573 Article
institution Library portal of National Academy of Sciences of Ukraine | LibNAS
collection Open-Science
language English
series Semiconductor Physics, Quantum Electronics and Optoelectronics
spellingShingle Semiconductor Physics, Quantum Electronics and Optoelectronics
I. V. Gorbov
A. A. Kryuchyn
K. P. Grytsenko
Yu. Manko
Yu. O. Borodin
High-density data recording via laser thermo-lithography and ion-beam etching
format Article
author I. V. Gorbov
A. A. Kryuchyn
K. P. Grytsenko
Yu. Manko
Yu. O. Borodin
author_facet I. V. Gorbov
A. A. Kryuchyn
K. P. Grytsenko
Yu. Manko
Yu. O. Borodin
author_sort I. V. Gorbov
title High-density data recording via laser thermo-lithography and ion-beam etching
title_short High-density data recording via laser thermo-lithography and ion-beam etching
title_full High-density data recording via laser thermo-lithography and ion-beam etching
title_fullStr High-density data recording via laser thermo-lithography and ion-beam etching
title_full_unstemmed High-density data recording via laser thermo-lithography and ion-beam etching
title_sort high-density data recording via laser thermo-lithography and ion-beam etching
publishDate 2014
url http://jnas.nbuv.gov.ua/article/UJRN-0000352573
work_keys_str_mv AT ivgorbov highdensitydatarecordingvialaserthermolithographyandionbeametching
AT aakryuchyn highdensitydatarecordingvialaserthermolithographyandionbeametching
AT kpgrytsenko highdensitydatarecordingvialaserthermolithographyandionbeametching
AT yumanko highdensitydatarecordingvialaserthermolithographyandionbeametching
AT yuoborodin highdensitydatarecordingvialaserthermolithographyandionbeametching
first_indexed 2024-04-17T05:14:25Z
last_indexed 2024-04-17T05:14:25Z
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