High-density data recording via laser thermo-lithography and ion-beam etching
Збережено в:
| Дата: | 2014 |
|---|---|
| Автори: | , , , , |
| Формат: | Стаття |
| Мова: | Англійська |
| Опубліковано: |
2014
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| Назва видання: | Semiconductor Physics, Quantum Electronics and Optoelectronics |
| Онлайн доступ: | http://jnas.nbuv.gov.ua/article/UJRN-0000352573 |
| Теги: |
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| Назва журналу: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
Репозитарії
Library portal of National Academy of Sciences of Ukraine | LibNAS| _version_ | 1859529731438804992 |
|---|---|
| author | I. V. Gorbov A. A. Kryuchyn K. P. Grytsenko Yu. Manko Yu. O. Borodin |
| author_facet | I. V. Gorbov A. A. Kryuchyn K. P. Grytsenko Yu. Manko Yu. O. Borodin |
| author_sort | I. V. Gorbov |
| collection | Open-Science |
| first_indexed | 2025-07-22T07:02:42Z |
| format | Article |
| id | open-sciencenbuvgovua-72685 |
| institution | Library portal of National Academy of Sciences of Ukraine | LibNAS |
| language | English |
| last_indexed | 2025-07-22T07:02:42Z |
| publishDate | 2014 |
| record_format | dspace |
| series | Semiconductor Physics, Quantum Electronics and Optoelectronics |
| spelling | open-sciencenbuvgovua-726852024-04-16T17:08:36Z High-density data recording via laser thermo-lithography and ion-beam etching I. V. Gorbov A. A. Kryuchyn K. P. Grytsenko Yu. Manko Yu. O. Borodin 1560-8034 2014 en Semiconductor Physics, Quantum Electronics and Optoelectronics http://jnas.nbuv.gov.ua/article/UJRN-0000352573 Article |
| spellingShingle | Semiconductor Physics, Quantum Electronics and Optoelectronics I. V. Gorbov A. A. Kryuchyn K. P. Grytsenko Yu. Manko Yu. O. Borodin High-density data recording via laser thermo-lithography and ion-beam etching |
| title | High-density data recording via laser thermo-lithography and ion-beam etching |
| title_full | High-density data recording via laser thermo-lithography and ion-beam etching |
| title_fullStr | High-density data recording via laser thermo-lithography and ion-beam etching |
| title_full_unstemmed | High-density data recording via laser thermo-lithography and ion-beam etching |
| title_short | High-density data recording via laser thermo-lithography and ion-beam etching |
| title_sort | high-density data recording via laser thermo-lithography and ion-beam etching |
| url | http://jnas.nbuv.gov.ua/article/UJRN-0000352573 |
| work_keys_str_mv | AT ivgorbov highdensitydatarecordingvialaserthermolithographyandionbeametching AT aakryuchyn highdensitydatarecordingvialaserthermolithographyandionbeametching AT kpgrytsenko highdensitydatarecordingvialaserthermolithographyandionbeametching AT yumanko highdensitydatarecordingvialaserthermolithographyandionbeametching AT yuoborodin highdensitydatarecordingvialaserthermolithographyandionbeametching |