High-density data recording via laser thermo-lithography and ion-beam etching
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| Datum: | 2014 |
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| Hauptverfasser: | , , , , |
| Format: | Artikel |
| Sprache: | English |
| Veröffentlicht: |
2014
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| Schriftenreihe: | Semiconductor Physics, Quantum Electronics and Optoelectronics |
| Online Zugang: | http://jnas.nbuv.gov.ua/article/UJRN-0000352573 |
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| Назва журналу: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
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open-sciencenbuvgovua-726852024-04-16T17:08:36Z High-density data recording via laser thermo-lithography and ion-beam etching I. V. Gorbov A. A. Kryuchyn K. P. Grytsenko Yu. Manko Yu. O. Borodin 1560-8034 2014 en Semiconductor Physics, Quantum Electronics and Optoelectronics http://jnas.nbuv.gov.ua/article/UJRN-0000352573 Article |
| institution |
Library portal of National Academy of Sciences of Ukraine | LibNAS |
| collection |
Open-Science |
| language |
English |
| series |
Semiconductor Physics, Quantum Electronics and Optoelectronics |
| spellingShingle |
Semiconductor Physics, Quantum Electronics and Optoelectronics I. V. Gorbov A. A. Kryuchyn K. P. Grytsenko Yu. Manko Yu. O. Borodin High-density data recording via laser thermo-lithography and ion-beam etching |
| format |
Article |
| author |
I. V. Gorbov A. A. Kryuchyn K. P. Grytsenko Yu. Manko Yu. O. Borodin |
| author_facet |
I. V. Gorbov A. A. Kryuchyn K. P. Grytsenko Yu. Manko Yu. O. Borodin |
| author_sort |
I. V. Gorbov |
| title |
High-density data recording via laser thermo-lithography and ion-beam etching |
| title_short |
High-density data recording via laser thermo-lithography and ion-beam etching |
| title_full |
High-density data recording via laser thermo-lithography and ion-beam etching |
| title_fullStr |
High-density data recording via laser thermo-lithography and ion-beam etching |
| title_full_unstemmed |
High-density data recording via laser thermo-lithography and ion-beam etching |
| title_sort |
high-density data recording via laser thermo-lithography and ion-beam etching |
| publishDate |
2014 |
| url |
http://jnas.nbuv.gov.ua/article/UJRN-0000352573 |
| work_keys_str_mv |
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| first_indexed |
2025-07-22T07:02:42Z |
| last_indexed |
2025-07-22T07:02:42Z |
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