High-density data recording via laser thermo-lithography and ion-beam etching
Збережено в:
| Дата: | 2014 |
|---|---|
| Автори: | , , , , |
| Формат: | Стаття |
| Мова: | English |
| Опубліковано: |
2014
|
| Назва видання: | Semiconductor Physics, Quantum Electronics and Optoelectronics |
| Онлайн доступ: | http://jnas.nbuv.gov.ua/article/UJRN-0000352573 |
| Теги: |
Додати тег
Немає тегів, Будьте першим, хто поставить тег для цього запису!
|
| Назва журналу: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
Репозитарії
Library portal of National Academy of Sciences of Ukraine | LibNAS| id |
open-sciencenbuvgovua-72685 |
|---|---|
| record_format |
dspace |
| spelling |
open-sciencenbuvgovua-726852024-04-16T17:08:36Z High-density data recording via laser thermo-lithography and ion-beam etching I. V. Gorbov A. A. Kryuchyn K. P. Grytsenko Yu. Manko Yu. O. Borodin 1560-8034 2014 en Semiconductor Physics, Quantum Electronics and Optoelectronics http://jnas.nbuv.gov.ua/article/UJRN-0000352573 Article |
| institution |
Library portal of National Academy of Sciences of Ukraine | LibNAS |
| collection |
Open-Science |
| language |
English |
| series |
Semiconductor Physics, Quantum Electronics and Optoelectronics |
| spellingShingle |
Semiconductor Physics, Quantum Electronics and Optoelectronics I. V. Gorbov A. A. Kryuchyn K. P. Grytsenko Yu. Manko Yu. O. Borodin High-density data recording via laser thermo-lithography and ion-beam etching |
| format |
Article |
| author |
I. V. Gorbov A. A. Kryuchyn K. P. Grytsenko Yu. Manko Yu. O. Borodin |
| author_facet |
I. V. Gorbov A. A. Kryuchyn K. P. Grytsenko Yu. Manko Yu. O. Borodin |
| author_sort |
I. V. Gorbov |
| title |
High-density data recording via laser thermo-lithography and ion-beam etching |
| title_short |
High-density data recording via laser thermo-lithography and ion-beam etching |
| title_full |
High-density data recording via laser thermo-lithography and ion-beam etching |
| title_fullStr |
High-density data recording via laser thermo-lithography and ion-beam etching |
| title_full_unstemmed |
High-density data recording via laser thermo-lithography and ion-beam etching |
| title_sort |
high-density data recording via laser thermo-lithography and ion-beam etching |
| publishDate |
2014 |
| url |
http://jnas.nbuv.gov.ua/article/UJRN-0000352573 |
| work_keys_str_mv |
AT ivgorbov highdensitydatarecordingvialaserthermolithographyandionbeametching AT aakryuchyn highdensitydatarecordingvialaserthermolithographyandionbeametching AT kpgrytsenko highdensitydatarecordingvialaserthermolithographyandionbeametching AT yumanko highdensitydatarecordingvialaserthermolithographyandionbeametching AT yuoborodin highdensitydatarecordingvialaserthermolithographyandionbeametching |
| first_indexed |
2024-04-17T05:14:25Z |
| last_indexed |
2024-04-17T05:14:25Z |
| _version_ |
1796884860752625664 |